00195982-03_SM_SWS_EN.pdf - 第280页

12 Wafer stretcher 12.4 Removing the wafer stretcher 280 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.386: ► Remove the four screws fastening the left (3) and right (4) downholder plates. ► Push the changeover …

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12 Wafer stretcher
12.4 Removing the wafer stretcher
Service Manual SIPLACE Wafer System (SWS) 11/2018 279
► Close the SWS software and then shut down the SWS itself.
► Switch off the SWS at the main switch.
► Disconnect the SWS from the power supply.
► Dismantle and remove the SWS from the CA machine!
► Use a machine key to open the wafer lift door.
► Open the wafer lift lock.
► Fold out the support foot!
► Fold the wafer lift outwards.
► See also the preparatory measures in the chapter "calibration" (15 "Calibration" [}361]).
CAUTION
The wafer table must be moved manually during all service work on the wafer stretcher.
Observe the following during this:
●
The die ejector must always be in the bottom position!
●
Always pay attention to the wafer changer gripper, to make sure that this is not damaged.
●
When working on the wafer support, the gripper could be damaged.
12.4 Removing the wafer stretcher
The removal is shown using the example of a 12" wafer stretcher. The procedure for an 8" wafer
stretcher is identical.
12.4.1 Preparing removal of the wafer stretcher
► Complete all required preparations!
1.1 "Safety instructions" [}13]
1.2 "Preparatory work..." [}15]
12.4.2 Dismantling the cover plate and the downholder plates
Fig.385:
► Pull the wafer stretcher to the open wafer lift (folded out) (2) and push the wafer changer (grip-
per) into the park position(1).
12 Wafer stretcher
12.4 Removing the wafer stretcher
280 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.386:
► Remove the four screws fastening the left (3) and right (4) downholder plates.
► Push the changeover table to a suitable position which gives you access to the recesses in
the lifting piston.
► Use the special auxiliary tool (mushroom-shaped tool) as an anti-rotation lock on the lifting
piston.
Fig.387:
► If you do not have this auxiliary tool (mushroom-shaped tool), use an Allen key. In this case,
take care not to damage the hole drilled in the lifting piston.
12 Wafer stretcher
12.4 Removing the wafer stretcher
Service Manual SIPLACE Wafer System (SWS) 11/2018 281
Fig.388:
► Remove the four Allen screws (3) holding the right downholder plate and remove the conical
fixing disk and Allen screw in each case.
Fig.389:
► Carefully remove the right downholder plate.