00195982-03_SM_SWS_EN.pdf - 第482页
18 Appendix 18.3 Specification: motor control 482 Service Manual SIPLACE Wafer System (SWS) 11/2018 Pickoff 24VDC, idle approx. 26VDC The output voltage 24 VDC / 8 A (2 pin circuit breaker 8A between alternating volta…
18 Appendix
18.2 Specification: power supply
Service Manual SIPLACE Wafer System (SWS) 11/2018 481
18.2.2 General structure of power supply
The factory set option for electrical energy (a.c. current, without N) is supplied in the back substruc-
ture (welded frame) and fed through a PG13 screwed connection directly to the mains filter Z1.
The PE (earth potential) is directly connected to the welded frame (M5 ring cable lug) and then to
the mains filter.
The infeed cable (4x2.5 mm²) via the filter to the main switch Q1 has a yellow shielded labeling.
The main switch 3x16A (yellow substructure with red rotary switch) is attached to the side panel
(right or left) of the wafer lift for good access.
The infeed for the switchboard, coming from the main switch, is run to terminal X1. The switch-
board features the fuse Q2 for the 3-phase rectifier unit T1.
The computer and the fuses Q1/ F1-F4 on the switchboard can be accessed via the bottom wafer
lift door.
By folding up the wafer lift and pushing the switchboard 50 cm out, you can also access the AMP
motor amplifier, the IO board and the vacuum pump.
18.2.3 Transformer T1 with rectification and connections
3-phase transformer with downstream integrated rectifier for 24VDC and 48VDC.
Type: 4AV3596-0EC40-0A, capacity: 690VA, degree of protection: IP00, insulation class: T60/B
Structure
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Input voltage: 415 / 400 / 380 / 230 / 204VAC, 50/60Hz,
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Output voltage/current: 230VAC/3A, 48VDC/13A, 24VDC/8A
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With 2x 2 pin circuit breakers between the secondary winding and the rectification.
For 24VDC = circuit breaker 5SY62/D8A
For 48VDC = circuit breaker 5SY62/D20A
Infeed
The infeed (3-phase a.c. current) is designed for five different mains voltages and is to be connec-
ted to the relevant terminals (labeled with voltages 415 / 400 / 380 / 230 / 204V). The input
voltages 200VAC (USA) and 210VAC (Japan) are to be connected to the 204V terminals.
The upstream overcurrent circuit breaker Q2 is to be set to a minimum of 6A trip current. When us-
ing the machine option with wafer heater, Q2 is to be set to 10A trip current.
Pickoff 230 VAC
The output voltage 230VAC/3A (primary pickoff T1 at terminal 230V and 0V) is only used for the
computer power pack. The computer power pack is secured with the circuit breaker F1 (4 A / 2
pin).
The computer mains voltage 230V is present when the main switch Q1 is switched on.
Pickoff 3x230VAC (for the wafer heater option)
The output voltage 3x230VAC (primary pickoff T1 at terminal 3x230V) is used for the wafer heat-
ing. The control has a modular design for retrofitting and is secured with the circuit breaker F5 (10
A / 3 pin).
The consumers are two heating coils, each with 1000W and a cross-current fan with 23 W.
18 Appendix
18.3 Specification: motor control
482 Service Manual SIPLACE Wafer System (SWS) 11/2018
Pickoff 24VDC, idle approx. 26VDC
The output voltage 24 VDC / 8 A (2 pin circuit breaker 8A between alternating voltage and rectific-
ation) supplies the monitor and the control voltage for actuators and sensors.
The monitor voltage is secured with the circuit breaker F2 (2 A / 1 pin) and is present when the
main switch is switched on.
The control voltage is secured with the circuit breaker F3 (6 A / 1 pin) and is present at terminals
X3-1..8 = GND and X3-13..16 = 24 V when the main switch is switched on.
24V/F3 voltage is provided for drives with emergency STOP function, via the upstream contactors
K1/K2 and is available at terminal X3-17.
The 24V GND potential is connected to ground via terminals X3-8 and 9.
Pickoff 48VDC, idle approx. 50VDC
The output voltage 48 VDC / 13 A (2 pin circuit breaker 20A between alternating voltage and recti-
fication) supplies the three AMP-19540(20) amplifiers for the downstream servo motors.
The 48 VDC voltage is secured with the circuit breaker F4 (13A/1 pin) and made available via the
upstream contactors K1/K2 in series, at terminal X2-6/7.
The 48 DC voltage for the emergency STOP function is switched off via the contactors K1 and K2.
18.3 Specification: motor control
18.3.1 Motor control concept
The motor control system consists of a Galil motor controller DMC-18x6 (PCI-BUS) and the Galil
servo amplifier AMP-19540(20).
It has a modular structure, designed for modular machine placement.
In the minimum machine placement setup, with no die attach unit or wafer handler, six servo mo-
tors are used.
The maximum machine placement setup uses ten servo motors.
18.3.1.1 Motor control placement variants
Placement 1: without die attach unit, without wafer handler
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1x motor controller DMC-1866 (6 axes)
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1x servo amplifier AMP-19540 (4 axes)
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1x servo amplifier AMP-19520 (2 axes)
Placement 2: with die attach unit, without wafer handler
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1x motor controller DMC-1886 (8 axes)
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2x servo amplifier AMP-19540 (4 axes)
Placement 3: without die attach unit, with wafer handler
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1x motor controller DMC-1866 (6 axes)
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1x motor controller DMC-1826 (2 axes)
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1x servo amplifier AMP-19540 (4 axes)
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2x servo amplifier AMP-19520 (2 axes)
18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 483
Placement 4: with die attach unit, with wafer handler
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1x motor controller DMC-1886 (8 axes)
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1x motor controller DMC-1826 (2 axes)
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2x servo amplifier AMP-19540 (4 axes)
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1x servo amplifier AMP-19520 (2 axes)
The motor controller DMC-1866(86) and DMC-1826 address each servo amplifier AMP-19540(20)
via a 100 pin cable.
The voltage supply (intermediate circuit voltage) for the amplifier AMP-19540(20) is 48VDC.
The intermediate circuit voltage is secured via F4/13A and switched on/off with K1 and K2 in
series, initiated via the emergency STOP function.
Several motor control signals are transmitted via the amplifier AMP-19540(20) and connector AUX-
IO J3x to the DMC-INT1(2) adapter boards (see also I/O system).
The limit and reference sensors belonging to the motor are connected to the DMC-INT1(2) adapter
boards.
The motor control signals (for each motor 1x reference, 2x limit, 1x amplify enable) are shown via
LEDs on the DMC-INT1(2) adapter boards.
The reference and limit sensors on the "DMC18x6" can be operated either with NPN or PNP.
The joint "LSCOM" connection for the sensors to the "DMC18x6" is run via the "DMC-INT1(2)"
adapter board with jumper "J2(J4)" to COM24, so that the sensors use PNP logic.
The run release for the motors requires that the relevant limit signal is present at +24 V.
The "FLx" (forward-limit) signal switches the motor off in the clockwise direction of rotation (see
flange).
The "RLx" (reverse-limit) signal switches the motor off in the anti-clockwise direction of rotation
(see flange).
When an "ABORT" signal (connection on the DMC-INT1(2) adapter boards) is issued, the motor
voltage releases the amplify-enable signal "AENx" via the controller.
Once the signal has been released, there will be +5 V present at the "ABORT".
If the signal has not been released, there will be GND (switched from K3) present at the "ABORT".
The encoder and Hall sensors are supplied with computer voltage +5V, looped through via the mo-
tor controller DMC-18x6 and the servo amplifier AMP-19540(20).
The encoder (shaft encoder for rotary operation, linear encoder for linear motor) works with 5V dif-
ferential pulse signals, track A, track B and index.
The encoder signals are transmitted directly via the AMP-19540(20) amplifier, through the 100 pin
cable to the DMC-18x6 motor controller.
The three Hall sensors (120° displaced, to match the windings) use 5V-TTL signals and are dir-
ectly fed to the AMP-19540(20) servo amplifiers for phase current regulation.
18.3.2 Motor controller DMC-18x6
See the document "DMC-18x6.pdf " page 9 to 13 "Chapter-1 Overview"
18.3.3 Servo amplifier AMP-19540(20)
See the document "AMP19540 _manuel.pdf"