00195982-03_SM_SWS_EN.pdf - 第297页

12 Wafer stretcher 12.6 Fitting the wafer stretcher Service Manual SIPLACE Wafer System (SWS) 11/2018 297 Fig.421: The X axis spindles are located on the wafer lift side. ► Remove the four Allen screws from the spindle …

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12 Wafer stretcher
12.6 Fitting the wafer stretcher
296 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.419:
► Roll out the cable chain and fix into place with the cables to an upper assembly.
This makes it easier to fit the wafer stretcher onto the guide trolleys, as you do not need to lift it
over the rolled-up cable chain.
Fig.420:
► Now carefully lift the wafer stretcher onto the four guide trolleys.
► Position the four guide trolleys so that the fastening holes in the wafer stretcher are in a line
with the threaded holes in the guide trolleys.
► Screw all four guide trolleys tightly into place.
You now need to establish the connection between the wafer stretcher and the drive spindle in the
X direction as follows:
12 Wafer stretcher
12.6 Fitting the wafer stretcher
Service Manual SIPLACE Wafer System (SWS) 11/2018 297
Fig.421:
The X axis spindles are located on the wafer lift side.
► Remove the four Allen screws from the spindle nut from the drive block.
► Disconnect the drive block from the spindle nut.
► Fasten the drive block to the threaded holes provided and hand-tighten the two hexagonal
screws.
Fig.422:
► Move the drive block and the wafer stretcher assembly to the spindle nut and screw the unit
into place with the four Allen screws.
► Tighten the two hexagonal screws.
ð The connection between the wafer stretcher and the X axis spindle has now been estab-
lished!
Next, fit the two lifting cylinders for the stretcher movement as follows:
12 Wafer stretcher
12.6 Fitting the wafer stretcher
298 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.423:
► Fit the lifting cylinder including the sleeve.
Fig.424:
► Fit the clamping cylinder with the bottom screw (the sensor labels on the clamping cylinder
are then at the top).
► The top screw is not yet fitted. This will be used later to fix the cover plate.