00195982-03_SM_SWS_EN.pdf - 第208页
9 Wafer change system 9.2 Gripper 208 Service Manual SIPLACE Wafer System (SWS) 11/2018 9.2.6 Replacing the solenoid valves Fig.268: Solenoid valves for the gripper control. The solenoid valve (Y1) controls the upwards …
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 207
9.2.5 Replacing the motor with coupling for wafer handling
Fig.267: Motor with coupling for wafer handling
The motor moves the gripper into the removal and processing position with the help of the toothed
belt axis.
Removal
► Remove the cover from the motor board (1).
► If there is no marking present on the cables: use the circuit diagram folder for help and mark
the cables connected.
► Open the cable ties and cable clips and unthread the motor cable and the flat ribbon cable for
the encoder as far as the motor board (1).
► Unplug the cable from the motor board.
► Move the toothed belt axis so that you can see the coupling through the opening (2) on the
motor flange (3).
► Remove the four screws (6) fastening the motor to the motor flange (3).
► Pull out the motor (5) with the coupling (4).
► Check the coupling (4) for damage and replace if necessary.
Installation
► Push the motor with coupling onto the drive shaft. While doing this, turn the coupling into the
position needed so that it can engage with its counterpart.
► Tighten the four fastening screws (6) on the motor flange.
► Connect the motor and encoder cables to the motor board.
► Fix and gather the cables together with cable ties, where necessary. Make sure that the
cables do not rub against any part or get trapped.
► Fit the cover on the motor board.
9 Wafer change system
9.2 Gripper
208 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.2.6 Replacing the solenoid valves
Fig.268: Solenoid valves for the gripper control.
The solenoid valve (Y1) controls the upwards and downwards movement of the gripper. The solen-
oid valve (Y2) also controls the clamping of the gripper (open/closed). The solenoid valves are ar-
ranged and labeled according to the version used (Y1/Y2). To identify the relevant solenoid valve,
read the circuit diagrams and the pneumatic plan.
Replacing the solenoid valve
► Unplug the pneumatic connections (4) and the electrical connections from the solenoid valves.
► Remove the fastening screws (3) and remove the solenoid valve.
► Fit the solenoid valve and restore the pneumatic and electrical connections.
► Check the solenoid valve for functionality.
– Switching on and off
► In the toolbar, select the button Manual Settings
.
► Go to the Manual Settingsview and select the button Manual Subsystems
and then
select IOs (see 14.2 "Manual settings" [}358]).
► Select the Wafer Changertab .
► Approach the solenoid valve Y1.
– DO18 Gripper up/down moves the gripper up and down.
► Check the input signals for the relevant position.
– DI29 Gripper position: up
– DI30 Gripper position: down
► Approach the solenoid valve Y2.
– DO19 Gripper open/closed opens and closes the gripper clamp.
► Check the input signals for the relevant position.
– DI31 Gripper: open
– DI32 Wafer present in gripper
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 209
9.2.6.1 Setting gentle clamping and moving of the gripper (for location 2/4)
Fig.269: Setting restrictor on gripper (2/4)
The setting restrictor helps to set the clamping of the gripper clamp (1), plus the upwards and
downwards movement of the gripper (2). Both of these actions should be gentle and with no impact
sound.
9.2.6.2 Setting gentle clamping and moving of the gripper (for location 1/3)
Fig.270: Setting restrictor on gripper (1/3)
The setting restrictor helps to set the clamping of the gripper clamp (1), plus the upwards and
downwards movement of the gripper (2). Both of these actions should be gentle and with no impact
sound.
When adjusting to the various frame strengths (thicknesses) check the return spring for the switch
flags (3).