00195982-03_SM_SWS_EN.pdf - 第401页

15 Calibration 15.4 Calibration of the complete wafer handling Service Manual SIPLACE Wafer System (SWS) 11/2018 401 Fig.585: ► Deselect Power for the Wafer changer . ð The wafer changer can be moved manually. ► The gri…

15 Calibration

15.4 Calibration of the complete wafer handling

400 Service Manual SIPLACE Wafer System (SWS) 11/2018

Manual operations – manual operations subsystems – wafer handling

► Choose Wafer handling from the Manual operations menu.

Fig.583:

► Choose Go to change position for the wafer table to move to the loading position.

► Enter the slot number of a slot which is occupied by a wafer. Choose To load wafer position.

► Activate the Setup mode.

HIGH RISK OF SERIOUS INJURIES

► Setup mode must be activated!

► Choose Open wafer lock to open the wafer frame clamping.

► Choose Gripper down.

Fig.584:

► Choose the white button and open the Motor settings.

15 Calibration

15.4 Calibration of the complete wafer handling

Service Manual SIPLACE Wafer System (SWS) 11/2018 401

Fig.585:

► Deselect Power for the Wafer changer.

ð The wafer changer can be moved manually.

► The gripper is open as default.

Fig.586:

► Move the wafer changer manually to the wafer frame. The frame must be inside the gripper.

► Choose Gripper close to activate the clamping function.

15 Calibration

15.4 Calibration of the complete wafer handling

402 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.587:

► Then try to move the wafer out of the magazine onto the wafer table, by pulling the wafer

changer backwards.

CAUTION

In the Setup mode, the magazine lift axis still can be moved.

Fig.588:

► Now the wafer table can be adjusted manually until it is aligned with the wafer magazine. Both

sides of the wafer frame should have the same gap to the rail of the wafer table. For fine ad-

justment, the wafer table can be moved by turning the spindle or motor of the related axis.