00195982-03_SM_SWS_EN.pdf - 第285页

12 Wafer stretcher 12.4 Removing the wafer stretcher Service Manual SIPLACE Wafer System (SWS) 11/2018 285 Fig.396: ► Fold the clamping cylinder (1) outwards. ► Remove the four screws (2) fastening the wafer stretcher f…

12 Wafer stretcher

12.4 Removing the wafer stretcher

284 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.394:

► Remove the cover plate.

12.4.3 Removal on the clamping and lifting cylinder side

For further removal of the wafer stretcher, you need to gain access to the 4x4 fastening screws.

Fig.395:

► Remove the screw fastening the clamping cylinder (1).

The top fastening screw (2) was already removed while dismantling the cover plate.

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 285

Fig.396:

► Fold the clamping cylinder (1) outwards.

► Remove the four screws (2) fastening the wafer stretcher from the guide trolley below.

Fig.397:

► Release the lifting cylinder.

► Lift off the lifting cylinder and remove the Allen screw (1) and the guide sleeve(2).

12 Wafer stretcher

12.4 Removing the wafer stretcher

286 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.398:

► Swivel the lifting cylinder (1) to one side. If needed, also unthread the connection at the piston

end.

► Remove the four screws (2) fastening the wafer stretcher from the guide trolley below.

The connection to the spindle in the X direction is still on this side of the wafer stretcher. To discon-

nect the connection, proceed as follows:

Fig.399:

► Remove the four screws on the spindle nut (2) underneath the clamping cylinder (1).