00195982-03_SM_SWS_EN.pdf - 第249页
10 Option Die Attach Unit SWS 10.2 Dissambling Die-Attach-Unit SWS Service Manual SIPLACE Wafer System (SWS) 11/2018 249 Fig.337: Parts The parts in the following figure are needed to close the open compressed air and v…
10 Option Die Attach Unit SWS
10.2 Dissambling Die-Attach-Unit SWS
248 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.335:
► Remove the Die Attach Unit safety screw (14).
CAUTION
Before you can lift out the Die Attach Unit, you must pull the transfer X axis back (see the
figure below and section 10.1.3 "Installing the Option Die Attach Unit in SWS" [}219]).
Otherwise, the axis will be bent and damaged!
Fig.336:
► Before you can remove the Die Attach Unit, you must pull the transfer X axis back to have the
jaw moved out of the flip head raceway!
► Lift the Die Attach Unit out.
10 Option Die Attach Unit SWS
10.2 Dissambling Die-Attach-Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 249
Fig.337: Parts
The parts in the following figure are needed to close the open compressed air and vacuum connec-
tions.
The sealing cap and the sealing plugs are delivered with the Die Attach Unit.
Fig.338: Plugs
► Plug the sealing plugs into the open compressed air connections.
Fig.339:
► Put the sealing cap onto the open vacuum tube.
10 Option Die Attach Unit SWS
10.2 Dissambling Die-Attach-Unit SWS
250 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.340:
The filling piece is required to fill the gap in the flip head raceway after removing the Die Attach
Unit. The filling piece is mounted on the Die Attach Unit (see figure).
Fig.341:
► Open the safety screws of the filling piece and take it out.