00195982-03_SM_SWS_EN.pdf - 第365页
15 Calibration 15.2 Activation of setup operation at the SWS (hard and software) Service Manual SIPLACE Wafer System (SWS) 11/2018 365 Fig.523: ► (3) Fold out the support foot and rotate the complete magazine lift. WARN…
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
364 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.521:
► Choose Calibration wafer lift (8).
► Choose the Positions tab (9).
► Choose Go to position (10) to move the lifting table to the magazine change position.
15.2.4 Changing the cables at the mounting plate to allow for setup mode
Tools required
●
Machine key
●
Allen key 5mm
Procedure
► Open the front door of the magazine lift by using the machine key!
Fig.522:
► Open the tower lock screw (2) by using the Allen key 5mm (the screw has a lost protection).
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
Service Manual SIPLACE Wafer System (SWS) 11/2018 365
Fig.523:
► (3) Fold out the support foot and rotate the complete magazine lift.
WARNING
Support foot
If the support foot is not in the outer position for the SWS in stand-alone mode, the SWS
might fall over and cause heavy injuries.
Fig.524:
► (4) Location of the mounting plate for the setup mode.
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
366 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.525:
The figure above shows the setting for the standard production mode (NON setup mode).
●
(5) Cable MP1 is connected to
(6) MP1b
●
(7) Cable MP2 is connected to
(8) MP2b
For the Setup mode, the following modification must be made:
Fig.526:
The figure above shows the setting for the Setup mode (safe mode).
●
(9) Cable MP1 must be connected to
(10) MP1b’
●
(11) Cable MP2 must be connected to
(12) MP2b’