00195982-03_SM_SWS_EN.pdf - 第487页
18 Appendix 18.3 Specification: motor control Service Manual SIPLACE Wafer System (SWS) 11/2018 487 18.3.5.8 Motor-9(A) = wafer magazine lift Brushless servo motor with Hall sensors 120°, type MSSI 055H-030E-048F ● Maxim…
18 Appendix
18.3 Specification: motor control
486 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.3.5.5 Motor-5(E) = flip-rotate
Brushless servo motor with Hall sensors 120°, type MSSI 055H-015E-048F
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Maximum speed Mmax = 44.8 Ncm
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Maximum current Imax = 2.0 Aeff
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Nominal speed n = 1750 U/min
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Terminal resistance = 12.1 ohm
Hollow shaft encoder, type Numerik-Jena RIK-2C 39/2048 M7-RZ
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With integrated offset and amplitude regulation
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Pitch circle diameter 39mm, number of lines =2048
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10-fold signal interpolation factor integrated in the connector
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Output signal RS422 = 5V differential with index track A,B,I
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Pulse per revolution = 2048-cpr x 10-fold = 20480-cpr, corresponds to 81920 count
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Resolution per count at the tool tip = 3.835 µm
18.3.5.6 Motor-6(F) = flip Z (pickup) motor-8(H) = flip X (handover)
3-phase linear motor with Hall sensors 120°, type ETEL TILS03-030-0018-CNN-20B
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Maximum stroke = 12mm
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Maximum acceleration = 200 m/s²
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Maximum speed = 1.3 m/s
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Maximum performance (peak force) = 19.9 N
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Maximum current Imax = 3.1 Aeff
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Terminal resistance = 4.1 ohm
Linear encoder, type RSF-Elektronik MS-100VHS
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Output signal RS422 = 5V differential with index track A,B,I
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Pulse distance = 2µm/cp, corresponds to 0.5µm/count
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Index signal I = 1mm before top mechanical stopper
18.3.5.7 Motor-7(G) = rotate die attach
Brushless servo motor with Hall sensors 120°, type MSSI 032H-017E-048F
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Maximum speed Mmax = 5.1 Ncm
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Maximum current Imax = 0.3 Aeff
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Nominal speed n = 2200 U/min
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Terminal resistance = 104 ohm
Shaft encoder, type SCANCON-2RMHF-7500
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Output signal RS422 = 5V differential signals with index track A,B,I
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Pulse per revolution = 7500 cpr, corresponds to 30000 count
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Resolution per count at the tool tip = 5.867 µm
18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 487
18.3.5.8 Motor-9(A) = wafer magazine lift
Brushless servo motor with Hall sensors 120°, type MSSI 055H-030E-048F
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Maximum speed Mmax = 1.6 Nm
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Maximum current Imax = 8.0 Aeff
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Nominal speed n = 2350 U/min
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Terminal resistance = 3.2 ohm
Shaft encoder, type HP - HEDL-5540
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Output signal RS422 = 5V differential signals with index track A,B,I
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Pulse per revolution = 500 cpr, corresponds to 2000 count
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Spindle pitch magazine left = 5mm/revolution
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Resolution per count = 2.5 µm
18.3.5.9 Motor-10(B) = wafer handler
Brushless servo motor with Hall sensors 120°, type MSSI 040H-017E-048F
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Maximum speed Mmax = 51.1 Ncm
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Maximum current Imax = 6.0 Aeff
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Nominal speed n = 5300 U/min
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Terminal resistance = 3.7 ohm
Shaft encoder, type HP - HEDL-5540
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Output signal RS422 = 5V differential signals with index track A,B,I
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Pulse per revolution = 500 cpr, corresponds to 2000 count
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Mechanical transmission = 38mm/revolution
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Resolution per count = 19 µm
18.3.6 Limit/home sensors with initialization
18.3.6.1 Initialization sequence for wafer table - X/Y MOT1(A) MOT2(B)
The X/Y axes for the wafer table have limit sensors to trigger a hardware motor stop approx. 5mm
before the mechanical end stop.
Axis "MOT-WX": motor stop to left = sensor "FL1", motor stop to right = sensor "RL1".
Axis "MOT-WY": motor stop to front = sensor "FL2", motor stop to back = sensor "RL2".
The initialization of the X/Y motors is via the home sensors "HM1" and "HM2".
The switching positions for the sensors are in the center of the wafer table, which is also the center
of the die ejector position.
The home signal "HM1" is +24V to the left of the center and 0V to the right of the center.
The home signal "HM2" is +24 V before the center and 0 V behind the center.
With this selection of home signals, the X/Y motors initialize in the center and then a search starts
for the encoder index signals.
The encoder index signals update the X/Y axis counter for circle calculation. This calculation of the
circle determines the software limit.
18 Appendix
18.3 Specification: motor control
488 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.3.6.2 Initialization sequence die ejector needle MOT4(D)
The die ejector needle axis has a lift of 5mm and is limited by the limit sensor board "DUAL-LB".
The light barriers "FL4" (top position) and "RL4" (bottom position) are used to stop the motor.
The initialization of the motor is downwards, towards the "RL4" sensor. The encoder index track is
then searched for in an upwards direction.
Once the index track has been found, the counter for the MOT4(D) axis is updated.
The index track of the encoder is roughly set during preassembly, so that the index track is approx.
700‑900µm from the "RL4" sensor.
If very poorly set, the needle could protrude from the die ejector cap during initialization.
18.3.6.3 Initialization run for flip rotor MOT5 (E)
The scenario for initializing the flip tool unit with the three motors tool-rotor, flip Z and flip X (=op-
tional die attach unit) is conducted in sequence, one after the other. The flip-rotor is initialized first.
During this, the linear motors flip Z and flip X are switched off and held by pneumatic cylinders in
the park position, so that the crank for the flip-rotor is closed.
The flip-rotor (180° movement forwards/backwards) is then switched on and searches for the home
sensor "HO5".
The home sensor sits at the top flip-rotor position, about 10° before it.
The encoder index track, which is positioned 15° before the top rotor position, is then searched for
in a clockwise direction.
The counter for the flip rotor will be updated and the motor will then move to the park position, so
that the flip Z and flip X motors are free to be initialized.
18.3.6.4 Initialization run for flip Z (pickup) MOT6 (F)
After initialization of the flip-rotor has been completed, the flip Z (pickup) and flip Y (handover) mo-
tors can be initialized at the same time.
The flip Z linear motor will be held in its switched off state at the top park position by the return cyl-
inder.
The flip Z motor will be supplied with power, then the return cylinder (set OUT 13 on) will be moved
downwards so that the travel distance downwards in free.
The home signal will then be switched "H06" (signal = 24 V), issuing the release for initialization.
The linear motor will search in an upwards direction for the index track, positioned approx. 0.5 mm
below the top mechanical stop.
Once the index track has been found, the counter for the MOT6(F) axis will be updated and the
motor will move to the saved park position.
During emergency STOP function
If the emergency STOP is pressed, the motor will then be current-free and the return cylinder will
be switched off at the same time via K1 (signal OUT13 will be interrupted).
The spring-loaded return cylinder will move upwards and the flip Z motor, coupled with the flip tool,
will be held in the set park position.