00195982-03_SM_SWS_EN.pdf - 第220页

10 Option Die Attach Unit SWS 10.1 Installing the Option Die Attach Unit SWS 220 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.286: ► Store the filling piece by mounting it on the Die Attach Unit as shown. Fig.…

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

Service Manual SIPLACE Wafer System (SWS) 11/2018 219

10.1.3 Installing the Option Die Attach Unit in SWS

Fig.284:

► Remove the cable ties of the Die Attach cables.

Fig.285:

► Remove the two screws and take out the filling piece on the raceway of the flip head. To pre-

vent any loss of the screws, lay a sheet of paper underneath (not shown in the figure)!

At this position the transfer X axis of the Die Attach Unit is inserted. The transfer X axis moves seg-

ment 1 of the flip head towards the Die Attach segment.

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

220 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.286:

► Store the filling piece by mounting it on the Die Attach Unit as shown.

Fig.287:

► Remove the sealing cap from the black vacuum tube.

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

Service Manual SIPLACE Wafer System (SWS) 11/2018 221

Fig.288:

► Remove the sealing plugs from the compressed air connections.

Fig.289:

► Take the flip chip reject bin for segment 1 out.