00195982-03_SM_SWS_EN.pdf - 第95页

5 Basic frame – X/Y unit 5.3 Replacing parts Service Manual SIPLACE Wafer System (SWS) 11/2018 95 Fig.93: ► Now slightly tighten the two fastening screws on the rear (with shortened, modified Allen key). Secure the scre…

5 Basic frame – X/Y unit

5.3 Replacing parts

94 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.91:

► Thread the coupling plate X motor unit over the coupling and onto the spindle.

Always hold the fastening screw in position with the Allen key.

Fig.92:

► Now push the system together, so that the motor shaft slides into the coupling.

Always hold the fastening screw in position with the Allen key, so that the screw does not fall

out of the hole.

► Push the coupling plate back and forth until you find the threaded hole.

► Loosely tighten the fastening screw so that the coupling plate can still be moved.

► Now slightly tighten the second fastening screw on the coupling plate from the front. Secure

the screw with Loctite243.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 95

Fig.93:

► Now slightly tighten the two fastening screws on the rear (with shortened, modified Allen key).

Secure the screws with Loctite 243.

Fig.94:

► Now carefully press the spindle plate and the whole spindle into the coupling plate.

Make sure that the spindle bearing moves smoothly and easily into the bearing shell.

5 Basic frame – X/Y unit

5.3 Replacing parts

96 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.95:

► Fasten the four screws for the spindle plate onto the coupling plate.

Secure the screws with Loctite 243.

► Now screw the coupling plate into place.

Fig.96:

► Align the coupling.

(1) approx. 6mm

(2) approx. 4mm

► Tighten the two clamping screws on the coupling!