00195982-03_SM_SWS_EN.pdf - 第259页
11 Extension groups 11.1 Wafer supports Service Manual SIPLACE Wafer System (SWS) 11/2018 259 11.1.3.3 Setting the wafer support width The width of the wafer support strips can be adjusted in accordance with the wafer fr…
11 Extension groups
11.1 Wafer supports
258 Service Manual SIPLACE Wafer System (SWS) 11/2018
11.1.3.2 Turning the wafer locking strip by 180 degrees (option for 8" wafer support)
There are two versions of the wafer locking strip (1). The wafer locking strip for the 12" wafer sup-
port can not be turned. The wafer locking strip for the 8" can be rotated by 180 degrees and then
fitted.
This makes it possible to process wafer frames with different locking positions and rotation posi-
tions(3) or(4) .
Fig.351: Turning the wafer locking strip
► Unscrew the two knurled screws (2) holding the wafer locking strip (1).
► Carefully lift off the wafer locking strip, rotate by 180degrees and fit again.
► Pay attention to the black O-rings (5) under the wafer locking strip. The O-rings must stay in
the openings and may not be lost. Replace with new ones, if necessary.
11 Extension groups
11.1 Wafer supports
Service Manual SIPLACE Wafer System (SWS) 11/2018 259
11.1.3.3 Setting the wafer support width
The width of the wafer support strips can be adjusted in accordance with the wafer frame. There
are two different positions (pin inside or pin outside).
Fig.352: Wafer support strip - adjusting the width
Both wafer support strips must be fitted in the same way. This means that both pins are either in-
side or outside. The diagram shows a wafer support strip with one pin (2) on the outside.
► Remove the knurled screw (1) from the wafer support strip (3). Remove both wafer support
strips.
The pin (2) must be either on the inside or outside of both wafer support strips.
CAUTION
Take care of the pneumatic hoses and cables
► Take care of the pneumatic hoses and cables. These may not be pinched or rubbed
against unprotected edges.
11.1.3.4 Replacing the driver on the clamp
The driver is the attachment for two different thicknesses of wafer frame and is fitted to the clamp.
Fig.353: Replacing the clamp driver
Two different drivers for metal and plastic wafer frames.
●
[00386221-xx] for thin, metal wafer frames
●
[00386560-xx] for thicker, plastic wafer frames
► Remove the two screws fastening the driver to the clamp and replace the driver.
► Align the driver with the two fastening screws so that it is centered and parallel to the wafer
frame (within the play of the drilled hole).
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11.1 Wafer supports
260 Service Manual SIPLACE Wafer System (SWS) 11/2018
11.1.3.5 Replacing the solenoid valve for the clamp
Fig.354: Solenoid valve for the driver clamp
The solenoid valve OUT9 (1) opens and closes the driver clamp (2).
► Unplug the pneumatic and electrical connections on the solenoid valve (OUT9).
► Remove the three fastening screws and then take off the solenoid valve.
► Fit the solenoid valve and restore the pneumatic and electrical connections.
► Check the solenoid valve for functionality.
– Switching on and off,
► Approach the solenoid valve.
► In the toolbar, select the button Manual Settings
.
► Go to Manual Settings and then select the Manual Subsystems
button and then se-
lect IOs (see 14.2 "Manual settings" [}358]).
► Select the Wafertabletab.
– DO09 Wafer clamp opens and closes the clamp.
► Check the input signals for the proximity switch.
– DI12 Wafer clamp open
– DI13 Wafer clamp closed
The inlet air flow restrictor (3) is used to adjust the clamp sequence. The driver must clamp first,
before the four downholders may close.