00195982-03_SM_SWS_EN.pdf - 第254页
10 Option Die Attach Unit SWS 10.2 Dissambling Die-Attach-Unit SWS 254 Service Manual SIPLACE Wafer System (SWS) 11/2018
10 Option Die Attach Unit SWS
10.2 Dissambling Die-Attach-Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 253
Fig.346: Storing the cables after disassembly on SWS at location 2 or 4
CAUTION
If the cables and tubes for the Die Attach Unit are not stored and bound together, there is a
danger of crash with the wafer table and the placement head!
Fig.347:
10 Option Die Attach Unit SWS
10.2 Dissambling Die-Attach-Unit SWS
254 Service Manual SIPLACE Wafer System (SWS) 11/2018
11 Extension groups
11.1 Wafer supports
Service Manual SIPLACE Wafer System (SWS) 11/2018 255
11 Extension groups
11.1 Wafer supports
The spare parts apply for the following wafer supports:
●
Wafer support 8" SWS12 (1/3) [00387217-xx]
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Wafer support 12" SWS12 (1/3) [00387020-xx]
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Wafer support 8" SWS12 (2/4) [00387411-xx]
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Wafer support 12" SWS12 (2/4) [00387412-xx]
11.1.1 Overview
Fig.348: Wafer support with wafer inserted (example for 12")
1. Wafer support
2. Wafer