00195982-03_SM_SWS_EN.pdf - 第69页

5 Basic frame – X/Y unit 5.2 Complete overview Service Manual SIPLACE Wafer System (SWS) 11/2018 69 5.2.2 X/Y unit – design and spare parts [00386776-xx] (example SWS 1/3) This unit is responsible for movement of the waf…

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5 Basic frame – X/Y unit
5.2 Complete overview
68 Service Manual SIPLACE Wafer System (SWS) 11/2018
5.2.1 Basic frame – design and spare parts [00386774-xx] (example SWS 1/3)
This unit is responsible for movement of the wafer table in the Y direction.
Fig.45:
Item Item no. Designation Comments
1 00385645-xx Brushless cybermotor - Y axis
2 03106447-xx Elastomer coupling without play d6,d10
3 0384600-xx AD-MOT Rev.0 Sub-D board = angled Under the cover
4 Ball screw drive and bearing unit
5 0386343-xx Proximity switch, inductive, PNP/1OE RL2
6 0386343-xx Proximity switch, inductive, PNP/1OE FL2
7 00379046-xx Adapter board wafer table AD-WT Rev.0 Under the cover
8 Cover shield for heating unit (stretcher) --> op-
tion
The spare parts for the
basic frame SWS12 (1/3) [00386774-xx]
and the
basic frame SWS12 (2/4) [00385830-xx]
are identical.
5 Basic frame – X/Y unit
5.2 Complete overview
Service Manual SIPLACE Wafer System (SWS) 11/2018 69
5.2.2 X/Y unit – design and spare parts [00386776-xx] (example SWS 1/3)
This unit is responsible for movement of the wafer table in the X direction.
Fig.46:
Item Item no. Designation Comments
1 00385072-xx Brushless cybermotor - X axis
2 03106447-xx Elastomer coupling without play d6,d10
3 0384600-xx AD-MOT Rev.0 Sub-D board = angled Under the cover
4 Ball screw drive and bearing unit
5 0386343-xx Proximity switch, inductive, PNP/1OE RL2
6 0386343-xx Proximity switch, inductive, PNP/1OE FL2
7 00379046-xx Adapter board wafer table AD-WT Rev.0 Under the cover
8 Cover shield for heating unit (stretcher) --> option
The spare parts for the
X/Y unit SWS12 (1,3) - [00386776-xx]
and the
X/Y unit SWS12 (2,4) - [00385864-xx]
are identical.
5 Basic frame – X/Y unit
5.2 Complete overview
70 Service Manual SIPLACE Wafer System (SWS) 11/2018
5.2.3 Overview of sensors
Fig.47:
Fig.48: