00195982-03_SM_SWS_EN.pdf - 第506页
Item no.: 00195982-03 ASM Assembly Systems GmbH & Co. KG Rupert-Mayer-Strasse 44 81379 Munich Germany www.asm-smt.com
18 Appendix
18.6 Wafer heating
504 Service Manual SIPLACE Wafer System (SWS) 11/2018
Item no.: 00195982-03 ASM Assembly Systems GmbH & Co. KG
Rupert-Mayer-Strasse 44
81379 Munich
Germany
www.asm-smt.com