00195982-03_SM_SWS_EN.pdf - 第303页

12 Wafer stretcher 12.6 Fitting the wafer stretcher Service Manual SIPLACE Wafer System (SWS) 11/2018 303 Fig.434: ► Now fit the left (3) and right downholder plates (4) with the four screws in each case, including the …

12 Wafer stretcher

12.6 Fitting the wafer stretcher

302 Service Manual SIPLACE Wafer System (SWS) 11/2018

12.6.4 Fitting the cover plate and the downholder plates

Fig.432:

► Position the wafer stretcher towards the wafer lift side.

Fig.433:

► Fit the cover plate with the four Phillips screws (1) to (4) and the Allen screws to the clamping

cylinder (5).

12 Wafer stretcher

12.6 Fitting the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 303

Fig.434:

► Now fit the left (3) and right downholder plates (4) with the four screws in each case, including

the conical fixing disk.

First only tighten the screws slightly.

► Align the downholder plates.

Tighten the screws as follows:

Fig.435:

► Use the mushroom-shaped tool or an Allen key for tightening, to stop the lifting piston turning.

12 Wafer stretcher

12.6 Fitting the wafer stretcher

304 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.436:

The wafer stretcher has now been completely fitted.

Perform the necessary calibrations.