00195982-03_SM_SWS_EN.pdf - 第345页

13 BoxPC, GALIL cards and axis control 13.2 GALIL cards in the BoxPC Service Manual SIPLACE Wafer System (SWS) 11/2018 345 Fig.493: ► Loosen/remove the Phillips screw on the GALIL card which you want to replace. Fig.49…

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13 BoxPC, GALIL cards and axis control
13.2 GALIL cards in the BoxPC
344 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.491:
► Remove the three screws (Phillips) fastening the USB hub.
► Remove the RS232 socket from the COM1 interface.
Fig.492:
► Fold the USB COM 1 unit to the side.
13 BoxPC, GALIL cards and axis control
13.2 GALIL cards in the BoxPC
Service Manual SIPLACE Wafer System (SWS) 11/2018 345
Fig.493:
► Loosen/remove the Phillips screw on the GALIL card which you want to replace.
Fig.494:
► Remove the card.
(The example shows a GALIL card DMC1886 including extension card for the axes AXIS1-4
and AXIS5-8.)
► Fit the new card, following the instructions in the reverse order.
No additional settings or calibrations are required.
13 BoxPC, GALIL cards and axis control
13.3 Replacing the servo amplifier for the axes
346 Service Manual SIPLACE Wafer System (SWS) 11/2018
13.3 Replacing the servo amplifier for the axes
All axes and motors in the SWS are driven by the servo amplifier.
There are two different types of servo amplifier (motor amplifier) which are used:
●
AMP-19540 → for 4 motors
●
AMP-19520 → for 2 motors
Fig.495:
Motor amplifier AMP-19540 (5) for the axes:
●
Wafer table X (6)
●
Wafer table Y (6)
●
Die ejector tool change (6)
●
Die ejector (6)
Motor amplifier AMP-19540 (7) for the axes:
●
Flip rotate (rotate axis flip unit) (8)
●
Flip Z axis pick up (8)
●
Die attach unit rotate (9) → optional
●
Flip X axis/hand over (9) → optional
As the die attach module is an option, older modules only feature one AMP-19520 for two axes.
When retrofitting this options, you need to fit one AMP-19540 for four axes.
In newer modules, the problematic retrofitting of the AMP means that one AMP-19540 for 4 axes
has become the standard.
However, there are still SWS with AMP-19520 for the axes (8) present at some customer sites:
●
Motor amplifier AMP-19520 (10) for the axes:
– Magazine lift (11)
– Wafer handler (gripper) (11)
In this case, one AMP-19520 for two axes is adequate, as this is fitted in the base of the wafer lift
tower and no additional optional axes will be added.