00195982-03_SM_SWS_EN.pdf - 第175页
8 Flip unit 8.2 Overview of spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 175 Return unit Fig.227: Return unit Flip unit - base plate Fig.228: Base plate - flip unit NOTICE The reset button on the USB-I…
8 Flip unit
8.2 Overview of spare parts
174 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.2 Overview of spare parts
Flip head
Fig.225: Flip head - view from behind
Fig.226: Flip head - view from the front
8 Flip unit
8.2 Overview of spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 175
Return unit
Fig.227: Return unit
Flip unit - base plate
Fig.228: Base plate - flip unit
NOTICE
The reset button on the USB-IO-Rev.2 board (11) may not be used (firmware version).
8 Flip unit
8.2 Overview of spare parts
176 Service Manual SIPLACE Wafer System (SWS) 11/2018
Flip unit - wafer camera
Fig.229: Flip unit - wafer camera
Flip unit - fuse on the USB I/O flip unit board
Fig.230: Flip unit - fuse on the USB I/O flip unit board