00195982-03_SM_SWS_EN.pdf - 第362页

15 Calibration 15.2 Activation of setup operation at the SWS (hard and software) 362 Service Manual SIPLACE Wafer System (SWS) 11/2018 15.2.2 Concept of retrofit for setup operation 4-pole 4-pole 4-pole 4-pole 4-pole 4-p…

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15 Calibration
15.1 General information
Service Manual SIPLACE Wafer System (SWS) 11/2018 361
15 Calibration
15.1 General information
CAUTION
Before starting any calibration
► Create a backup of the machine data (see 15.5.1 "Machine data" [}408]).
► Create a backup of the product data (see 15.5.2 "Product data" [}409]).
15.2 Activation of setup operation at the SWS (hard and
software)
15.2.1 Precondition
The hardware retrofit according the Technical Information TI2016-11C08 (chapter 4.2) must have
been performed.
A number of setup operations require the emergency stop circuit to be bridged in order to test func-
tions and make settings when the hood is open.
To nevertheless provide an adequate level of safety, it is necessary to ensure that the axes of the
wafer table cannot move.
In order to allow this, an additional circuit will be fitted.
Thus, it is possible to deactivate the wafer table motors during the tasks in setup mode.
WARNING
Risk of serious injuries!
The lifting axis is still activated even in the setup mode.
► Don´t put your fingers inside the slot of the cover on the lift!
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
362 Service Manual SIPLACE Wafer System (SWS) 11/2018
15.2.2 Concept of retrofit for setup operation
Fig.518:
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
Service Manual SIPLACE Wafer System (SWS) 11/2018 363
15.2.3 Preparation of the software
To get access to the mounting plate for enabling the setup mode, the magazine lift must be in the
magazine change position.
The following steps must be performed:
Fig.519:
► Choose Settings (1).
► Choose User Settings (2).
► Choose Machine Service (3).
► Enter the password (4) for the access level Machine Service → service1
► Choose Login (5).
Fig.520:
► Choose Service (6).
► Choose Calibration of wafer changer (7).