00195982-03_SM_SWS_EN.pdf - 第27页
2 Overview of the SIPLACE wafer system (SWS) 2.4 Description of SWS assemblies Service Manual SIPLACE Wafer System (SWS) 11/2018 27 2.4 Description of SWS assemblies 2.4.1 Supply unit Fig.8: Supply unit 1. Manometer for…
2 Overview of the SIPLACE wafer system (SWS)
2.3 Detailed overview of main assemblies
26 Service Manual SIPLACE Wafer System (SWS) 11/2018
2.3.1 Overview of assemblies in wafer table area
Fig.7: Overview of assemblies for SWS
1. Clamping unit
2. Wafer camera
3. Flip unit
4. Wafer support
5. Guidance
2 Overview of the SIPLACE wafer system (SWS)
2.4 Description of SWS assemblies
Service Manual SIPLACE Wafer System (SWS) 11/2018 27
2.4 Description of SWS assemblies
2.4.1 Supply unit
Fig.8: Supply unit
1. Manometer for compressed air supply
2. Power supply
3. Communication with the placement machine
4. CAN bus
5. Compressed air connection (modified adapter dummy plug [03011592‑xx]
6. LAN1
7. LAN2
2 Overview of the SIPLACE wafer system (SWS)
2.4 Description of SWS assemblies
28 Service Manual SIPLACE Wafer System (SWS) 11/2018
2.4.1.1 Flip unit
Fig.9: Flip unit
1. Flip head
2. Nozzle/tool support