00195982-03_SM_SWS_EN.pdf - 第144页

7 Die ejector 7.3 Replacing spare parts 144 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.176: Die ejector (example of SWS 2/4 shown) ► Insert the left hand into the die ejector recess, lift it gently and put th…

7 Die ejector

7.3 Replacing spare parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 143

Fig.174:

► Thread the base plate in and position it on the SWS plate. Make sure that it does not bump

against anything.

Fig.175:

► Place the base plate down on the SWS plate (2). The die ejector recess (3) points in the direc-

tion of the wafer lift.

7 Die ejector

7.3 Replacing spare parts

144 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.176: Die ejector (example of SWS 2/4 shown)

► Insert the left hand into the die ejector recess, lift it gently and put the right hand under the

front side.

The diagram is for a die ejector with an SWS 2/4.

When using an SWS 1/3, you need to insert the right hand into the recess and hold the front

side with the left hand.

SWS 2/4

Fig.177:

► Lift the base plate slightly and turn this by approx. 90° to the left (anticlockwise).

► Carefully lower the base plate.

7 Die ejector

7.3 Replacing spare parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 145

SWS 1/3

Fig.178:

► Lift the base plate slightly and turn this by approx. 90° to the right (clockwise).

► Carefully lower the base plate.

Fig.179: SWS base plate