00195982-03_SM_SWS_EN.pdf - 第12页
12 Service Manual SIPLACE Wafer System (SWS) 11/2018
12 Service Manual SIPLACE Wafer System (SWS) 11/2018
1 Introduction
1.1 Safety instructions
Service Manual SIPLACE Wafer System (SWS) 11/2018 13
1 Introduction
This service manual is a guide for performing service work on the SIPLACE® wafer system (SWS).
1.1 Safety instructions
DANGER
Nonobservance of these safety instructions may cause injury to personnel and dam-
age to the machine!
► Please observe the safety instructions in the user manual of the relevant machine
for all work!
1.1.1 Conventions for the use of safety instructions and symbols
Safety instructions
This manual contains notes that must be observed to guarantee your personal safety and to avoid
damage to equipment. These notes are highlighted by warning triangles and are indicated as fol-
lows according to the level of risk:
DANGER
Definition
For the purposes of this manual, this indicates that fatal or severe injuries or considerable
damage to property will occur if this hazard warning is not observed.
WARNING
Definition
For the purposes of this manual, this indicates that fatal or severe injuries or considerable
damage to equipment may occur if these warning instructions are not followed.
CAUTION
Definition
For the purposes of this manual, this indicates that minor injuries or damage to property
may occur if this caution is not observed.
NOTICE
Definition
For the purposes of this manual, this note provides information about the product or indic-
ates a part of the manual that requires particular attention.
Symbols
Example Description
Next This typeface marks controls and interface elements in the software.
► These symbol indicates actions that have to be performed by the operator.