00195982-03_SM_SWS_EN.pdf - 第484页
18 Appendix 18.3 Specification: motor control 484 Service Manual SIPLACE Wafer System (SWS) 11/2018 18.3.4 Signal tracking motor 1-10 The 3-phase brushless servo motors with Hall commutation and differential pulse encode…
18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 483
Placement 4: with die attach unit, with wafer handler
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1x motor controller DMC-1886 (8 axes)
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1x motor controller DMC-1826 (2 axes)
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2x servo amplifier AMP-19540 (4 axes)
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1x servo amplifier AMP-19520 (2 axes)
The motor controller DMC-1866(86) and DMC-1826 address each servo amplifier AMP-19540(20)
via a 100 pin cable.
The voltage supply (intermediate circuit voltage) for the amplifier AMP-19540(20) is 48VDC.
The intermediate circuit voltage is secured via F4/13A and switched on/off with K1 and K2 in
series, initiated via the emergency STOP function.
Several motor control signals are transmitted via the amplifier AMP-19540(20) and connector AUX-
IO J3x to the DMC-INT1(2) adapter boards (see also I/O system).
The limit and reference sensors belonging to the motor are connected to the DMC-INT1(2) adapter
boards.
The motor control signals (for each motor 1x reference, 2x limit, 1x amplify enable) are shown via
LEDs on the DMC-INT1(2) adapter boards.
The reference and limit sensors on the "DMC18x6" can be operated either with NPN or PNP.
The joint "LSCOM" connection for the sensors to the "DMC18x6" is run via the "DMC-INT1(2)"
adapter board with jumper "J2(J4)" to COM24, so that the sensors use PNP logic.
The run release for the motors requires that the relevant limit signal is present at +24 V.
The "FLx" (forward-limit) signal switches the motor off in the clockwise direction of rotation (see
flange).
The "RLx" (reverse-limit) signal switches the motor off in the anti-clockwise direction of rotation
(see flange).
When an "ABORT" signal (connection on the DMC-INT1(2) adapter boards) is issued, the motor
voltage releases the amplify-enable signal "AENx" via the controller.
Once the signal has been released, there will be +5 V present at the "ABORT".
If the signal has not been released, there will be GND (switched from K3) present at the "ABORT".
The encoder and Hall sensors are supplied with computer voltage +5V, looped through via the mo-
tor controller DMC-18x6 and the servo amplifier AMP-19540(20).
The encoder (shaft encoder for rotary operation, linear encoder for linear motor) works with 5V dif-
ferential pulse signals, track A, track B and index.
The encoder signals are transmitted directly via the AMP-19540(20) amplifier, through the 100 pin
cable to the DMC-18x6 motor controller.
The three Hall sensors (120° displaced, to match the windings) use 5V-TTL signals and are dir-
ectly fed to the AMP-19540(20) servo amplifiers for phase current regulation.
18.3.2 Motor controller DMC-18x6
See the document "DMC-18x6.pdf " page 9 to 13 "Chapter-1 Overview"
18.3.3 Servo amplifier AMP-19540(20)
See the document "AMP19540 _manuel.pdf"
18 Appendix
18.3 Specification: motor control
484 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.3.4 Signal tracking motor 1-10
The 3-phase brushless servo motors with Hall commutation and differential pulse encoder are dir-
ectly connected from the AMP-19540(20) through one to one cables (1x cable motor, 1x cable en-
coder/Hall) via connection-adapter boards.
These motors are numbered from 1 to 10 according to their modular design and marked with the
following label on the amplifier and cable.
The motors with cable are labeled "MP x". The encoder/Hall cables are labelled "ENC x"
Controller DMC-1866(86) Select = "Term_0"
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Motor-1(A) = wafer table X "MP1" ---- "MOT-WX"
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Motor-2(B) = wafer table Y "MP2" ---- "MOT-WY"
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Motor-3(C) = Die ejector tool changer "MP3" ---- "MOT-DEC" **Optional CSM12**
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Motor-4(D) = Die ejector needle "MP4" ---- "MOT-DE"
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Motor-5(E) = flip-rotate "MP5" ---- "MOT-FR"
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Motor-6(F) = flip Z axis (pickup) "MP6" ---- "MOT-FZ" ** = linear motor **
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Motor-7(G) = die attach-rotate "MP7" ---- "MOT-DA"
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Motor-8(H) = flip X axis (handover) "MP8" ---- "MOT-FX" ** = linear motor **
Controller DMC-1826 select = "term_1"
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Motor-9(A) = wafer magazine lift "MP9" ---- "MOT-WL"
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Motor-10(B) = wafer changer "MP10" ---- "MOT-WH"
18.3.5 Motor/encoder specifications:
18.3.5.1 Motor-1(A) = wafer table X
Brushless servo motor with Hall sensors 120°, type MSSI 040H-017E-048F (CSM8
only)
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Maximum speed Mmax = 51.1 Ncm
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Maximum current Imax = 6.0 Aeff
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Nominal speed n = 5300 U/min
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Terminal resistance = 3.7 ohm
Brushless servo motor with Hall sensors 120°, type MSSI 040H-027E-048F (CSM12
only)
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Maximum speed Mmax = 76.5 Ncm
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Maximum current Imax = 9.0 Aeff
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Nominal speed n = 5500 U/min
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Terminal resistance = 1.9 ohm
Shaft encoder, type SCANCON-2RMHF-IDC-2000
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Output signal RS422 = 5V differential signals with index track A,B,I
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Pulse per revolution = 2000 cpr, corresponds to 8000 count
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Spindle pitch wafer table X = 5mm/revolution
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Resolution per count = 0.625 µm
18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 485
18.3.5.2 Motor-2(B) = wafer table Y
Brushless servo motor with Hall sensors 120°, type MSSI 040H-027E-048F (CSM8
only)
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Maximum speed Mmax = 76.5 Ncm
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Maximum current Imax = 9.0 Aeff
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Nominal speed n = 5500 U/min
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Terminal resistance = 1.9 ohm
Brushless servo motor with Hall sensors 120°, type MSSI 040H-037E-048F (CSM12
only)
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Maximum speed Mmax = 90.6 Ncm
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Maximum current Imax = 11.0 Aeff
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Nominal speed n = 5900 U/min
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Terminal resistance = 1.2 ohm
Shaft encoder, type SCANCON-2RMHF-IDC-2000
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Output signal RS422 = 5V differential signals with index track A,B,I
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Pulse per revolution = 2000 cpr, corresponds to 8000 count
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Spindle pitch wafer table X = 5mm/revolution
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Resolution per count = 0.625 µm
18.3.5.3 Motor-3(C) = die ejector tool changer
Motor with encoder not yet specified.
18.3.5.4 Motor-4(D) = die ejector needle
Brushless servo motor with Hall sensors 120°, type Hatherway QB01701-C
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Maximum speed Mmax = 119 Ncm
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Maximum current Imax = 14 Aeff
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Idle speed n = 15488 U/min
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Terminal resistance = 6.5 ohm
Shaft encoder, type HP - HEDL-5540
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Output signal RS422 = 5V differential signals with index track A,B,I
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Pulse per revolution = 500 cpr, corresponds to 2000 count
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Spindle pitch die ejector = 2mm/revolution
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Resolution per count = 1.0 µm