00195982-03_SM_SWS_EN.pdf - 第242页

10 Option Die Attach Unit SWS 10.1 Installing the Option Die Attach Unit SWS 242 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.324: ► Choose Finish . ð The die attach rotation axis is initialized. ð If the calib…

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

Service Manual SIPLACE Wafer System (SWS) 11/2018 241

Fig.322:

Fig.323:

► Mount the gauge back at its the original position.

► Choose Next.

ð The following window with Step 4 is displayed.

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

242 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.324:

► Choose Finish.

ð The die attach rotation axis is initialized.

ð If the calibration was done correctly, the segment must be in the upper transfer position

after the initialization.

10.1.5.2 Calibration of the Die Attach Transfer X Axis

► Change to the operator level Service.

Fig.325:

► Choose the Service menu and then choose the button for the transfer X axis.

► Choose the Automatic calibration button.

ð The calibration of the transfer X home position is done automatically.

10 Option Die Attach Unit SWS

10.2 Dissambling Die-Attach-Unit SWS

Service Manual SIPLACE Wafer System (SWS) 11/2018 243

10.2 Dissambling Die-Attach-Unit SWS

Required tool

●

2.5mm Allen key

Procedure

► Shut down the SWS in the GUI.

► Switch the SWS off at the main switch.

Fig.326:

► Remove the cover of the Die Attach Unit.