00195982-03_SM_SWS_EN.pdf - 第78页

5 Basic frame – X/Y unit 5.3 Replacing parts 78 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.61: The Y motor and coupling plate are now separate. Pay attention to the position.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 77

Fig.59:

► Remove the coupling clamping screw for the motor shaft.

You might need to widen the coupling clamp with a screwdriver.

► Pull the coupling off the motor shaft.

Fig.60:

► Remove the four screws fastening the motor to the coupling plate.

5 Basic frame – X/Y unit

5.3 Replacing parts

78 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.61:

The Y motor and coupling plate are now separate.

Pay attention to the position.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 79

5.3.1.2 Removing the Y motor (alternative, without coupling)

Special tool

●

T Allen key 2.5mm (not contained in the standard set of tools)

Procedure

The motor can, in certain circumstances, be replaced more easily. To do so, proceed as follows:

► Unplug the cable connections from the adapter board.

► Remove the coupling clamping screw for the motor shaft.

Fig.62:

► Take a long T Allen key and open the four screws fastening the motor on the coupling plate!

The access to the two lower screws could vary (e.g. underneath the base plate).

► Remove the motor!