00195982-03_SM_SWS_EN.pdf - 第191页
9 Wafer change system Service Manual SIPLACE Wafer System (SWS) 11/2018 191 9 Wafer change system There are two different versions, which vary only in their mirrored arrangement of the modules, and that depend on the l…
8 Flip unit
8.4 Calibration – flip unit
190 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.4.5 Overview of offset correction in X and Y direction
Segment Moving the print Mechanical correction Correct per SW entry
1 to the right (X) Turn the X adjusting nut anti-
clockwise
Negative offset entry
To the left (X) Turn the X adjusting nut clock-
wise
Positive offset entry
Downwards (Y) Turn the Y adjusting nut clock-
wise
No correction per SW possible
Upwards (Y) Turn the Y adjusting nut anti-
clockwise
No correction per SW possible
2 to the right (X) Turn the X adjusting nut clock-
wise
Negative offset entry
To the left (X) Turn the X adjusting nut anti-
clockwise
Positive offset entry
Downwards (Y) Turn the Y adjusting nut clock-
wise
No correction per SW possible
Upwards (Y) Turn the Y adjusting nut anti-
clockwise
No correction per SW possible
9 Wafer change system
Service Manual SIPLACE Wafer System (SWS) 11/2018 191
9 Wafer change system
There are two different versions, which vary only in their mirrored arrangement of the modules, and
that depend on the location. There are two different versions for the gripper, for locations 1/3 and
location 2/4.
●
Wafer change system SWS12 (1/3) [00387216-xx]
●
Wafer change system SWS12 (2/4) [00386432-xx]
Fig.250: Wafer change system
1. Magazine lift
2. Gripper
3. Gripper cover
9 Wafer change system
9.1 Magazine lift
192 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.1 Magazine lift
●
Magazine lift SWS12 (1/3) [00387216-xx]
●
Magazine lift SWS12 (2/4) [00386436-xx]
Fig.251: Magazine lift
Overview of spare parts
Item Item no. Designation
03066505-01 Diffuse mode sensor (wafer slot sensor)
00387493-01 Diffuse mode sensor (lift crash sensor)
4 00385143-01 Board DMC.INT1 Rev.0
3 03106448-01 Elastomer coupling without play d9,d10
Long metal bellows coupling DKN 20-32 10 9 (for short recirculating
ball screw)
1 03076559-01 Motor
3 03076606-01 Inductive sensor NBB2-F29-A2
03076689-xx 2 microswitches Saia Burgess XCG3-S1Z1 with cables
9.1.1 Replacing spare parts
9.1.1.1 Preparations
All tasks can be performed in the fitted state.
► Open the door.
► Remove the locking screw.
► Swing the front cover open to the right or left (depending on the variant).