00195982-03_SM_SWS_EN.pdf - 第200页

9 Wafer change system 9.1 Magazine lift 200 Service Manual SIPLACE Wafer System (SWS) 11/2018 9.1.2 Electrical system NOTICE Observe the circuit diagrams. For details of the electrical assemblies on the wafer lift, pleas…

9 Wafer change system

9.1 Magazine lift

Service Manual SIPLACE Wafer System (SWS) 11/2018 199

9.1.1.8 Wafer lift - replacing the recirculating ball screw

WARNING

Only for experienced service technical from ASM Assembly Systems GmbH & Co.KG

Replacement of the recirculating ball screw and the corresponding settings required may

only be performed by experienced service technicians from ASM Assembly Systems GmbH

& Co.KG.

Fig.258: Wafer lift - replacing the recirculating ball screw

► Remove both screws (1).

► Remove the sixteen screws (2) and then remove the unit. The unit is fitted to the Passstifte.

► Remove the screw on the coupling (3).

► Remove the two screws on the fixed bearing part (4).

► Remove the two screws on the top spindle bearing (5) and then remove the recirculating ball

screw.

► Tighten the clamping screw for the coupling with a torque of 1.0 Nm.

9 Wafer change system

9.1 Magazine lift

200 Service Manual SIPLACE Wafer System (SWS) 11/2018

9.1.2 Electrical system

NOTICE

Observe the circuit diagrams.

For details of the electrical assemblies on the wafer lift, please refer to the circuit diagrams

[00195960‑xx].

Fig.259: Electrics down on the wafer lift (overview)

1. Amplifier module 2-axes AMP-19520

2. Board DMC interface input/output

3. Protective contactor combination with optoelectronic coupler

4. Fuse 3 AT on the board DMC interface

9 Wafer change system

9.2 Gripper

Service Manual SIPLACE Wafer System (SWS) 11/2018 201

9.2 Gripper

●

Gripper SWS12 (1/3) [00387108-xx]

●

Gripper SWS12 (2/4) [00385525-xx]

9.2.1 Overview of main assemblies

Fig.260: Main gripper assemblies (location 2/4)

1. Gripper

2. Toothed belt axis

3. Motor with coupling

4. AD-MOT board under the cover

Fig.261: Main gripper assemblies (location 1/3)

5. Gripper

6. Toothed belt axis

7. Motor with coupling

8. AD-MOT board

9. Height adjustment

10. Barcode scanner (optional)