00195982-03_SM_SWS_EN.pdf - 第25页

2 Overview of the SIPLACE wafer system (SWS) 2.3 Detailed overview of main assemblies Service Manual SIPLACE Wafer System (SWS) 11/2018 25 2.3 Detailed overview of main assemblies Fig.6: Exploded view of main assemblies…

2 Overview of the SIPLACE wafer system (SWS)

2.2 Overview of main assemblies

24 Service Manual SIPLACE Wafer System (SWS) 11/2018

View of SWS from the front (magazine lift removed)

Fig.5: SWS supply unit, view from the front

1. Electrical unit, view from the front

2. Computer unit

3. Transformer

4. Push switch

5. Main power filter

6. Solenoid valve

7. Cover

2 Overview of the SIPLACE wafer system (SWS)

2.3 Detailed overview of main assemblies

Service Manual SIPLACE Wafer System (SWS) 11/2018 25

2.3 Detailed overview of main assemblies

Fig.6: Exploded view of main assemblies

1 Supply unit 2 Die ejector

3 Basic frame 4 X/Y unit

5 Wafer support for 8" or 12", fitted to X/Y

unit

6 Flip unit

7 Barcode scanner fitted to side of gripper

or (8) barcode scanner fitted to side of

magazine lift

8 Barcode scanner fitted to side of

magazine lift

9 Wafer-magazine lift 10 Wafer-changer unit

2 Overview of the SIPLACE wafer system (SWS)

2.3 Detailed overview of main assemblies

26 Service Manual SIPLACE Wafer System (SWS) 11/2018

2.3.1 Overview of assemblies in wafer table area

Fig.7: Overview of assemblies for SWS

1. Clamping unit

2. Wafer camera

3. Flip unit

4. Wafer support

5. Guidance