00195982-03_SM_SWS_EN.pdf - 第88页

5 Basic frame – X/Y unit 5.3 Replacing parts 88 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.79: ► Remove the four Allen key fastening screws (not the Phillips screws) from the coupling plate, together with the…

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 87

Fig.77:

Fig.78:

► Carefully loosen the cable downholder under the X motor coupling plate.

Due to the lack of space, you will need to work with the ball head of an Allen key.

Take care not to damage the screw!

► Do not fully remove the cable downholder screw. Swivel the cable downholder away from the

shielding cable.

5 Basic frame – X/Y unit

5.3 Replacing parts

88 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.79:

► Remove the four Allen key fastening screws (not the Phillips screws) from the coupling plate,

together with the spindle plate.

Fig.80:

► Remove the two clamping screws from the coupling.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 89

Fig.81:

► Move the wafer table until the X motor is level with the semicircular recess in the side frame.

Fig.82:

► Now remove the two screws fastening the front of the coupling housing.

► Remove the two fastening screws on the back with a short (modified) Allen key.