00195982-03_SM_SWS_EN.pdf - 第109页
6 Supply unit 6.1 Overview of spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 109 Fig.116: Fuses on the mains transformer Fig.117: Fuses on the board with placement DMC-INT2 Rev.0
6 Supply unit
6.1 Overview of spare parts
108 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.114: Electrical unit from the front - detailed view
Fig.115: Supply unit from the back
6 Supply unit
6.1 Overview of spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 109
Fig.116: Fuses on the mains transformer
Fig.117: Fuses on the board with placement DMC-INT2 Rev.0
6 Supply unit
6.1 Overview of spare parts
110 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.118: PC cable connection with PCAN-USB
Spare parts in the supply unit
Item Item no. Designation
1 00385151-xx Electrical unit
2 00385144-xx Board with placement DMC-INT2 Rev.0
3 00385552-xx Solenoid valve CPE14-M1BH-3GL-QS-6
4 00385556-xx Push switch SDE5-D10-O1-Q4-P-M8
5 00385172-xx Mains power filter 440/250V/8A B84143-A8-R000
6 00385147-xx 3-phase rectifier 48V13A 24V8A
7 00385145-02 BoxPC with CPU MAYFLOWER-M8 in the supply unit
8 00387487-xx Motor / transformer protective switch 3.5-5A
9 03072892-xx F1 230 VAC - assembly
10 00385233-xx F2 24 V - monitor
11 03070740-xx F3 24 V - control
12 03128364-xx F4 48 V - driver
13 00385606-xx Optoelectronic coupler EMG-10-OE-60DC/48DC/100
14 00385983-xx Optoelectronic coupler DEK-0V-24VDC/24DC/10
15 00385570-xx Membrane vacuum pump and compressor
16 00385155-xx Amplifier module 4-axes AMP-19540-V01
17 Mains transformer
18 Fuse on transformer - D 20A / 48V
19 Fuse on transformer - D 8A / 24V
20 03078643-xx Fuse 1 AT
21 03078645-xx Fuse 3 AT
22 00385160-xx High-density cable 100 pin 2 meters for DMC 1826 (for the
wafer lift)