00195982-03_SM_SWS_EN.pdf - 第284页

12 Wafer stretcher 12.4 Removing the wafer stretcher 284 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.394: ► Remove the cover plate. 12.4.3 Removal on the clamping and lifting cylinder side For further removal …

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 283

Fig.392:

The cover plate for the clamping unit must now be removed as follows:

Fig.393:

► Remove the four Phillips screws (1) to (4) and the Allen screw (5). The Allen screw is also

used to fasten the clamping cylinder under the cover plate.

12 Wafer stretcher

12.4 Removing the wafer stretcher

284 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.394:

► Remove the cover plate.

12.4.3 Removal on the clamping and lifting cylinder side

For further removal of the wafer stretcher, you need to gain access to the 4x4 fastening screws.

Fig.395:

► Remove the screw fastening the clamping cylinder (1).

The top fastening screw (2) was already removed while dismantling the cover plate.

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 285

Fig.396:

► Fold the clamping cylinder (1) outwards.

► Remove the four screws (2) fastening the wafer stretcher from the guide trolley below.

Fig.397:

► Release the lifting cylinder.

► Lift off the lifting cylinder and remove the Allen screw (1) and the guide sleeve(2).