00195982-03_SM_SWS_EN.pdf - 第179页
8 Flip unit 8.3 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 179 8.3.3 Replacing the pneumatic return unit Fig.232: Pneumatic retract unit ► In the toolbar, select the button Manual Settings .…
8 Flip unit
8.3 Replacing spare parts
178 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.3 Replacing spare parts
8.3.1 Replacing the flip unit
This description will be added in the next document version. Until then, please contact your
SIPLACE service team.
8.3.1.1 Calibrating the home position for segment 1
NOTICE
Segment 1 can be recognized due to the sensor flag with the mechanical stop being in this
area.
Fig.231: Setting the home position for segment 1
► Move the adjustment fork to the setting position (2).
► Move segment 1 to the home position and set the transfer position for the nozzle.
The switch flag must match the sensor (3), then segment 1 will be active.
► Fasten the adjustment fork again in a park position on the motor.
► Continue by calibrating the hollow shaft motor.
8.3.1.2 Calibrating the hollow shaft motor
After the replacement and after setting the transfer position, the motor needs to be calibrated. The
valves determined must be entered on the label on the motor body (1).
See 14.3 "Camera calibration" [}359]
8.3.2 Replacing the suction plate
► Remove the screw-in thread for the suction plate and then remove the suction plate.
Make sure that the spacer ring remains in its position. It will not be air-tight if this is not the
case.
► The new suction plate must be positioned straight. If not, there is a risk that the screw-in
thread could be damaged.
► Fasten the suction plate with a torque of 13 Ncm.
8 Flip unit
8.3 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 179
8.3.3 Replacing the pneumatic return unit
Fig.232: Pneumatic retract unit
► In the toolbar, select the button Manual Settings
.
► Go to the Manual Settingsview and select the button Manual Subsystems
and then
select IOs (see 14.2 "Manual settings" [}358]).
► Select the Flipper and Die Attachtab.
► Move the return unit with the D013 Z axis holder.
ð The Z Axis holding cylinder free display will shine.
8 Flip unit
8.3 Replacing spare parts
180 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.3.4 Removing the wafer camera on the flip unit
Fig.233: Wafer camera – flat ribbon cable and camera connector
NOTICE
Only replace the wafer camera as a whole
The wafer camera with holder bracket may only be replaced as a whole unit. The three
screws fastening the camera (4) are sealed and may not be loosened.
► Remove the cover from the flip unit.
► Remove the reject bin and the cable cover underneath (1), including screws.
► Pull the two flat ribbon cables off the USB board (2). Pay attention how the flat ribbon cables
are run from the USB board to the wafer camera.
Connection no. 1 is for the bright field board, connection no. 2 for the dark field board.
► Remove the camera connector (3) with the three fastening screws. The central one is still
clamping a shield into place.