00195982-03_SM_SWS_EN.pdf - 第113页
6 Supply unit 6.2 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 113 6.2.2 Replacing the BoxPC Fig.121: Replacing the BoxPC ► Remove all cables from the back of the BoxPC. ► Loosen the four fast…
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6.2 Replacing spare parts
112 Service Manual SIPLACE Wafer System (SWS) 11/2018
6.2.1.2 Closing the magazine lift
► Swivel the magazine lift back into its starting position.
► Use the two screws you removed earlier to fasten the magazine lift to the SWS.
► Use the machine key to close the bottom door on the magazine lift.
► Fold the SWS support foot back in again so that it is parallel to the SWS.
6.2.1.3 Pulling out the supply unit
In order to perform service work on components which require access from the front and side, you
must also remove the supply unit.
CAUTION
Observe the electrical and pneumatic cables.
► When pulling out and inserting the supply unit, make sure that the electrical and pneu-
matic cables do not get caught anywhere or even torn off.
► Open the magazine lift (see 6.2.1.1 "Swinging up the magazine lift" [}111]).
► Remove the two screws on the supply unit.
► Pull the supply unit out towards the front.
► Pay attention to the cables on the back of the supply unit.
► Perform the required service work and push the supply unit back in again.
6.2.1.4 Inserting the supply unit
CAUTION
Observe the electrical and pneumatic cables.
► When pulling out and inserting the supply unit, make sure that the electrical and pneu-
matic cables do not get caught anywhere or even torn off.
► Push the supply unit into the SWS.
► Use the two screws you removed earlier to fasten the supply unit into place.
► Close the magazine lift (see 6.2.1.2 "Closing the magazine lift" [}112]).
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6.2 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 113
6.2.2 Replacing the BoxPC
Fig.121: Replacing the BoxPC
► Remove all cables from the back of the BoxPC.
► Loosen the four fastening screws(1).
► Pull the BoxPC approx. 15 mm forwards in its slotted holes.
► Lift the BoxPC slightly and then lift it out of the supply unit.
6.2.3 Replacing the vacuum pump
Fig.122: Vacuum pump - connections below
► When fitting and removing, pay attention to the connections(1) on the bottom of the vacuum
pump. The connections could break easily and must not be damaged.
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114 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.123: Replacing the vacuum pump
► Disconnect the vacuum hose at the hose coupling (1) .
► Disconnect the power supply at the connector (2).
► Remove the four fastening screws(3).
► Replace the vacuum pump.
6.2.4 Replacing the Galil motor card AMP-19540 or AMP-19520
CAUTION
ESD guidelines are to be followed
► Observe the ESD guidelines in section 1.3.4.3 "Handling ESD modules" [}17]) and in
the instruction manual for your machine.
Fig.124: Replacing the Galil motor card AMP-19540 or AMP-19520
► Unplug the connection cable (1) and (2).
► Remove the four fastening screws in each case.
► Replace the relevant Galil motor card.