00195982-03_SM_SWS_EN.pdf - 第486页

18 Appendix 18.3 Specification: motor control 486 Service Manual SIPLACE Wafer System (SWS) 11/2018 18.3.5.5 Motor-5(E) = flip-rotate Brushless servo motor with Hall sensors 120°, type MSSI 055H-015E-048F ● Maximum speed…

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18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 485
18.3.5.2 Motor-2(B) = wafer table Y
Brushless servo motor with Hall sensors 120°, type MSSI 040H-027E-048F (CSM8
only)
●
Maximum speed Mmax = 76.5 Ncm
●
Maximum current Imax = 9.0 Aeff
●
Nominal speed n = 5500 U/min
●
Terminal resistance = 1.9 ohm
Brushless servo motor with Hall sensors 120°, type MSSI 040H-037E-048F (CSM12
only)
●
Maximum speed Mmax = 90.6 Ncm
●
Maximum current Imax = 11.0 Aeff
●
Nominal speed n = 5900 U/min
●
Terminal resistance = 1.2 ohm
Shaft encoder, type SCANCON-2RMHF-IDC-2000
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 2000 cpr, corresponds to 8000 count
●
Spindle pitch wafer table X = 5mm/revolution
●
Resolution per count = 0.625 µm
18.3.5.3 Motor-3(C) = die ejector tool changer
Motor with encoder not yet specified.
18.3.5.4 Motor-4(D) = die ejector needle
Brushless servo motor with Hall sensors 120°, type Hatherway QB01701-C
●
Maximum speed Mmax = 119 Ncm
●
Maximum current Imax = 14 Aeff
●
Idle speed n = 15488 U/min
●
Terminal resistance = 6.5 ohm
Shaft encoder, type HP - HEDL-5540
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 500 cpr, corresponds to 2000 count
●
Spindle pitch die ejector = 2mm/revolution
●
Resolution per count = 1.0 µm
18 Appendix
18.3 Specification: motor control
486 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.3.5.5 Motor-5(E) = flip-rotate
Brushless servo motor with Hall sensors 120°, type MSSI 055H-015E-048F
●
Maximum speed Mmax = 44.8 Ncm
●
Maximum current Imax = 2.0 Aeff
●
Nominal speed n = 1750 U/min
●
Terminal resistance = 12.1 ohm
Hollow shaft encoder, type Numerik-Jena RIK-2C 39/2048 M7-RZ
●
With integrated offset and amplitude regulation
●
Pitch circle diameter 39mm, number of lines =2048
●
10-fold signal interpolation factor integrated in the connector
●
Output signal RS422 = 5V differential with index track A,B,I
●
Pulse per revolution = 2048-cpr x 10-fold = 20480-cpr, corresponds to 81920 count
●
Resolution per count at the tool tip = 3.835 µm
18.3.5.6 Motor-6(F) = flip Z (pickup) motor-8(H) = flip X (handover)
3-phase linear motor with Hall sensors 120°, type ETEL TILS03-030-0018-CNN-20B
●
Maximum stroke = 12mm
●
Maximum acceleration = 200 m/s²
●
Maximum speed = 1.3 m/s
●
Maximum performance (peak force) = 19.9 N
●
Maximum current Imax = 3.1 Aeff
●
Terminal resistance = 4.1 ohm
Linear encoder, type RSF-Elektronik MS-100VHS
●
Output signal RS422 = 5V differential with index track A,B,I
●
Pulse distance = 2µm/cp, corresponds to 0.5µm/count
●
Index signal I = 1mm before top mechanical stopper
18.3.5.7 Motor-7(G) = rotate die attach
Brushless servo motor with Hall sensors 120°, type MSSI 032H-017E-048F
●
Maximum speed Mmax = 5.1 Ncm
●
Maximum current Imax = 0.3 Aeff
●
Nominal speed n = 2200 U/min
●
Terminal resistance = 104 ohm
Shaft encoder, type SCANCON-2RMHF-7500
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 7500 cpr, corresponds to 30000 count
●
Resolution per count at the tool tip = 5.867 µm
18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 487
18.3.5.8 Motor-9(A) = wafer magazine lift
Brushless servo motor with Hall sensors 120°, type MSSI 055H-030E-048F
●
Maximum speed Mmax = 1.6 Nm
●
Maximum current Imax = 8.0 Aeff
●
Nominal speed n = 2350 U/min
●
Terminal resistance = 3.2 ohm
Shaft encoder, type HP - HEDL-5540
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 500 cpr, corresponds to 2000 count
●
Spindle pitch magazine left = 5mm/revolution
●
Resolution per count = 2.5 µm
18.3.5.9 Motor-10(B) = wafer handler
Brushless servo motor with Hall sensors 120°, type MSSI 040H-017E-048F
●
Maximum speed Mmax = 51.1 Ncm
●
Maximum current Imax = 6.0 Aeff
●
Nominal speed n = 5300 U/min
●
Terminal resistance = 3.7 ohm
Shaft encoder, type HP - HEDL-5540
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 500 cpr, corresponds to 2000 count
●
Mechanical transmission = 38mm/revolution
●
Resolution per count = 19 µm
18.3.6 Limit/home sensors with initialization
18.3.6.1 Initialization sequence for wafer table - X/Y MOT1(A) MOT2(B)
The X/Y axes for the wafer table have limit sensors to trigger a hardware motor stop approx. 5mm
before the mechanical end stop.
Axis "MOT-WX": motor stop to left = sensor "FL1", motor stop to right = sensor "RL1".
Axis "MOT-WY": motor stop to front = sensor "FL2", motor stop to back = sensor "RL2".
The initialization of the X/Y motors is via the home sensors "HM1" and "HM2".
The switching positions for the sensors are in the center of the wafer table, which is also the center
of the die ejector position.
The home signal "HM1" is +24V to the left of the center and 0V to the right of the center.
The home signal "HM2" is +24 V before the center and 0 V behind the center.
With this selection of home signals, the X/Y motors initialize in the center and then a search starts
for the encoder index signals.
The encoder index signals update the X/Y axis counter for circle calculation. This calculation of the
circle determines the software limit.