00195982-03_SM_SWS_EN.pdf - 第353页

13 BoxPC, GALIL cards and axis control 13.3 Replacing the servo amplifier for the axes Service Manual SIPLACE Wafer System (SWS) 11/2018 353 13.3.3 Fitting the servo amplifier AMP-19540 in the SWS frame Tip for installat…

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

352 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.504:

► Compare all jumpers on the new card before fitting them with the old card.

► If the new GALIL card does not yet have a LABEL for the connections, try to transfer the label

from the old card to the new card.

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

Service Manual SIPLACE Wafer System (SWS) 11/2018 353

13.3.3 Fitting the servo amplifier AMP-19540 in the SWS frame

Tip for installation

Due to the inaccessibility of the installation position, it is very difficult to screw the GALIL card into

place if the vacuum pump has not been removed (as in our example).

Fig.505:

► Take a sheet (piece) of paper.

► Press the Allen key through this paper and into the Allen key.

► Our example only shows the hole in the paper as a demonstration.

► Use a straight Allen key or spherical head → try and see which works better for you.

ð The screw should then hold on the Allen key and not fall off. This helps when inserting the

screw is places which are not so easily accessible.

Fitting the GALIL card

Fig.506:

► Lift the GALIL card from above into the position provided.

► Align the GALIL card so that that the drilled holes are in a line with one another.

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

354 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.507:

► Screw the four fastening screws and their washers into the four holes provided.

► Use the paper to fix the screws onto the Allen key.

► Tighten the four screws.

Fig.508:

► Reestablish the ground connection.