00195982-03_SM_SWS_EN.pdf - 第374页
15 Calibration 15.3 Calibration die handling - flip unit 374 Service Manual SIPLACE Wafer System (SWS) 11/2018 15.3.2.2 Calibration – flip head rotation axis NO RISK OF SERIOUS INJURIES ► Setup mode not activated! Machin…
15 Calibration
15.3 Calibration die handling - flip unit
Service Manual SIPLACE Wafer System (SWS) 11/2018 373
15.3.2 Calibration of the SWS – flip head
Precondition
●
The Setup mode is active after the cable connections at the mounting plate have been
changed (see 15.2.4 "Changing the cables at the mounting plate to allow for setup
mode" [}364]).
●
The yellow window Setup mode is active is displayed in the GUI.
●
Password for Setup mode → SetupTools.
Tools required
●
Teflon tape (local source → plumbing workers / hardware store) → no ASM part number.
15.3.2.1 Entering calibration menu – flip head
Fig.535:
► Choose Service in the bottom menu bar.
► Choose Die handling calibration.
Before starting the calibration, the holding cylinder for the flip Z axis and the Die Attach
transfer X motor (optional) must be adjusted! →Check that based on the previous chapters.
It is especially important to calibrate the flip rotation axis before calibrating the Z axis (cali-
bration 15.3.2.2 "Calibration – flip head rotation axis" [}374]). Otherwise, the automatic cali-
bration result for the Z axis will not be accurate.
When calibrating the flip head, proceed in the sequence that is described in the following!
You have to switch through different menus during the calibration!
15 Calibration
15.3 Calibration die handling - flip unit
374 Service Manual SIPLACE Wafer System (SWS) 11/2018
15.3.2.2 Calibration – flip head rotation axis
NO RISK OF SERIOUS INJURIES
► Setup mode not activated!
Machine covers are closed!
This calibration detects the zero point of the flip head rotation axis.
After this calibration, the ball bearing of the Z axis is positioned exactly in the center of the Z axis
actuator!
Fig.536:
► Choose Service calibration flipper on the right menu bar.
Usually, this button is active when you enter this menu.
Fig.537:
► Choose Calibration for the flip head rotation axis (1).
► Choose Start calibration (2).
ð The automatic calibration sequence starts.
► During the calibration, the status Execute is active (3).
► After successful calibration, the status changes to Ready.
15 Calibration
15.3 Calibration die handling - flip unit
Service Manual SIPLACE Wafer System (SWS) 11/2018 375
How Automatic calibration for the flip head rotation axis works
► The flip rotation axis is referenced.
► The flip Z axis is moved down by 3mm. In that case, the Z position defined by the holding cyl-
inder will be used as the home position of the Z axis because the Z axis is possibly not calib-
rated at this point.
Fig.538:
► The flip rotation axis is moved until there is a time-out by touching the Z axis actuator with the
bearing of one segment. This position of the rotation axis saved.
Fig.539:
► After that, the rotation axis moves in the opposite direction, until the Z axis actuator is touched
by the bearing of the other segment. This position is also saved.
► From these two positions of the flip rotation axis, the average value is calculated and thus the
home position of flip rotation is defined.