00195982-03_SM_SWS_EN.pdf - 第189页
8 Flip unit 8.4 Calibration – flip unit Service Manual SIPLACE Wafer System (SWS) 11/2018 189 8.4.4.4 Correction in Y direction (segment 1) In the Y direction, the offset can only be corrected via the adjusting nut at th…
8 Flip unit
8.4 Calibration – flip unit
188 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.4.4.3 Correction in X direction (segment 2)
There are two options for correction in the X direction (rotation direction of flip head):
●
(1) Correction of X offset in the SWS GUI via the parameter Offset segment 1 (see 15.3.2.4
"Calibration – segment offset calibration in X direction" [}379]).
A positive offset entry moves the print to the left while a negative offset entry moves the print
to the right.
●
(2) Move the print via the adjusting nut at the segment.
To adjust the adjusting nut, you first need to loosen the counternut (see below).
Fig.246: Segment 2 - loosening the counternut (X direction)
► Hold the adjusting nut with the fork wrench and loosen the counternut with the Allen key.
Fig.247: Segment 2 - turning the X adjusting nut
Turning the adjusting nut enables you to correct the segment offset:
Setting valid for segment 2:
●
Moving the print to the right -> turn the X adjusting nut clockwise.
●
Moving the print to the left -> turn the X adjusting nut anticlockwise.
8 Flip unit
8.4 Calibration – flip unit
Service Manual SIPLACE Wafer System (SWS) 11/2018 189
8.4.4.4 Correction in Y direction (segment 1)
In the Y direction, the offset can only be corrected via the adjusting nut at the relevant segment.
To adjust the adjusting nut, you first need to loosen the counternut (see below).
Fig.248: Segment 2 - loosening/tightening the counternut (Y direction)
► Hold the adjusting nut with the fork wrench and loosen the counternut with the Allen key.
Fig.249: Segment 2 - turn the adjustment screw (Y direction)
Effect of Y adjusting nut:
●
Moving the print downwards -> turn the Y adjusting nut clockwise.
●
Moving the print upwards -> turn the Y adjusting nut anticlockwise.
► After successful correction, hold the adjusting nut in position with the fork wrench and tighten
the counternut with the Allen key.
8 Flip unit
8.4 Calibration – flip unit
190 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.4.5 Overview of offset correction in X and Y direction
Segment Moving the print Mechanical correction Correct per SW entry
1 to the right (X) Turn the X adjusting nut anti-
clockwise
Negative offset entry
To the left (X) Turn the X adjusting nut clock-
wise
Positive offset entry
Downwards (Y) Turn the Y adjusting nut clock-
wise
No correction per SW possible
Upwards (Y) Turn the Y adjusting nut anti-
clockwise
No correction per SW possible
2 to the right (X) Turn the X adjusting nut clock-
wise
Negative offset entry
To the left (X) Turn the X adjusting nut anti-
clockwise
Positive offset entry
Downwards (Y) Turn the Y adjusting nut clock-
wise
No correction per SW possible
Upwards (Y) Turn the Y adjusting nut anti-
clockwise
No correction per SW possible