00195982-03_SM_SWS_EN.pdf - 第212页
9 Wafer change system 9.2 Gripper 212 Service Manual SIPLACE Wafer System (SWS) 11/2018 9.2.9 Replacing the toothed belt axis WARNING Only for experienced service technical from ASM Assembly Systems GmbH & Co.KG Repl…
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 211
9.2.8 Dismantling the gripper for location 2/4
Fig.273: Dismantling the gripper for location 2/4
► Remove the screws (2) fastening the gripper (1).
► Place the gripper carefully into the SWS. Loosen or open the cable ties to reach a suitable
position, if needed.
► Unplug the pneumatic connections at the couplings provided.
► Unthread the connection cable as far as the conversion board on the gripper arm.
► If there is no marking present on the cables: use the circuit diagram folder for help and mark
the cables connected.
► Unplug all connections from the terminal strip.
► Fit the new gripper and check the height.
► The gripper clamp must be able to reliably pick up a wafer frame and clamp it into place (see
9.2.7 "Dismantling the gripper for location 1/3" [}210]).
Fig.274: Setting the gripper height (variant 2,4)
► Use the adjusting screw (1) to correct the height.
9 Wafer change system
9.2 Gripper
212 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.2.9 Replacing the toothed belt axis
WARNING
Only for experienced service technical from ASM Assembly Systems GmbH & Co.KG
Replacement of the toothed belt axis and the corresponding settings required may only be
performed by experienced service technicians from ASM Assembly Systems GmbH &
Co.KG. Incorrect assembly of the toothed belt axis could lead to damage to the SWS.
► Dismantle the two proximity switches and remove from the toothed belt axis (see9.2.4 "Repla-
cing the proximity switch on the toothed belt axis" [}204]).
Follows the instructions described there. However, the electrical connections do not need to
be unplugged.
► Dismantle the gripper and place the gripper carefully into the SWS.
See also 9.2.7 "Dismantling the gripper for location 1/3" [}210]
or 9.2.8 "Dismantling the gripper for location 2/4" [}211]
► Loosen or open the cable ties to reach a suitable position, if needed.
► Remove both screws (2) (see diagram in 9.2.9 "Replacing the toothed belt axis" [}212]) used
to fit the toothed belt axis assembly to the frame.
► Tilt the complete toothed belt axis forwards.
Fig.275: Take toothed belt axis assembly off the frame
► Remove the four (2x2) screws (3) fastening the toothed belt axis and then remove the toothed
belt axis itself.
► Fit the new toothed belt axis (4) with the complete toothed belt axis in its original position.
► Fit the gripper (1).
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 213
9.2.9.1 Aligning the height of the toothed belt axis on the lift
Fig.276: Aligning the height of the toothed belt axis on the lift
► Move the gripper in the direction of the wafer lift and then move it downwards.
► Insert the auxiliary rail (3) (e.g. a stable strip of metal).
► Remove the fastening screw (2) and adjust the height of this with the setscrew (1).
► The auxiliary rail (3) must lie flush on the wafer support rail. Then tighten the fastening screw
(2).
9.2.9.2 Aligning the height of the toothed belt axis at the changer
Fig.277: Aligning the height of the toothed belt axis at the changer
► Move the gripper to the "home position" and then move it downwards.
► Insert the auxiliary rail (1) (e.g. a stable strip of metal). The auxiliary rail must lie flush on the
wafer support rail.
► Remove the screw (2).
► Adjust the height with the setscrew (3).
► Fix the screw.