00195982-03_SM_SWS_EN.pdf - 第292页

12 Wafer stretcher 12.4 Removing the wafer stretcher 292 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.411: ► Take care when pushing the wafer stretcher in the Y direction. The cable of the rolled out power chai…

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 291

Fig.409:

► Pull the wafer changer to the middle of the wafer stretcher (1).

► Remove the four fastening screws (2) from the guide trolleys beneath.

Fig.410:

► Now carefully lift the wafer stretcher, with the metal edge and blue valve (1), over the power

chain (3)!

Take care that the wafer stretcher does not hit the upper assemblies (2) when it is lifted out.

Tip: roll out the power chain so you do not need to lift the wafer stretcher so high.

12 Wafer stretcher

12.4 Removing the wafer stretcher

292 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.411:

► Take care when pushing the wafer stretcher in the Y direction. The cable of the rolled out

power chain could get caught on the upper assemblies.

Fig.412:

► Push the wafer changer to a back position (1) and unthread the wafer stretcher carefully,

under and out through the frame (2).

12 Wafer stretcher

12.5 Overview of wafer stretcher parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 293

12.5 Overview of wafer stretcher parts

Fig.413:

The following wafer stretcher parts were removed:

1. Wafer stretcher frame (here: 12")

2. Cover plate board

3. Cover plate clamping and lifting cylinder

4. Downholder plate, left

5. Downholder plate, right

The above mentioned parts are needed for installation. All the screws and fastenings required are

provided with the delivery.

12.6 Fitting the wafer stretcher

The installation is shown using the example of a 12" wafer stretcher. The procedure for an 8" wafer

stretcher is identical.

If the wafer stretcher fitted is a retrofit, refer to chapter 12.4 "Removing the wafer stretcher" [}279].

Identical installation steps will be clearly indicated. This makes it easier to understand the installa-

tion process.

12.6.1 Preparations for fitting the wafer stretcher

The following conditions need to be fulfilled in order for the wafer stretcher to be fitted:

●

A wafer table has been removed.

●

Another wafer stretcher has been removed.

Make sure that the die ejector is in a low position.

For an overview of the wafer stretcher parts, refer to section 12.5 "Overview of wafer stretcher

parts" [}293].