00195982-03_SM_SWS_EN.pdf - 第485页
18 Appendix 18.3 Specification: motor control Service Manual SIPLACE Wafer System (SWS) 11/2018 485 18.3.5.2 Motor-2(B) = wafer table Y Brushless servo motor with Hall sensors 120°, type MSSI 040H-027E-048F (CSM8 only) ●…
18 Appendix
18.3 Specification: motor control
484 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.3.4 Signal tracking motor 1-10
The 3-phase brushless servo motors with Hall commutation and differential pulse encoder are dir-
ectly connected from the AMP-19540(20) through one to one cables (1x cable motor, 1x cable en-
coder/Hall) via connection-adapter boards.
These motors are numbered from 1 to 10 according to their modular design and marked with the
following label on the amplifier and cable.
The motors with cable are labeled "MP x". The encoder/Hall cables are labelled "ENC x"
Controller DMC-1866(86) Select = "Term_0"
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Motor-1(A) = wafer table X "MP1" ---- "MOT-WX"
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Motor-2(B) = wafer table Y "MP2" ---- "MOT-WY"
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Motor-3(C) = Die ejector tool changer "MP3" ---- "MOT-DEC" **Optional CSM12**
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Motor-4(D) = Die ejector needle "MP4" ---- "MOT-DE"
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Motor-5(E) = flip-rotate "MP5" ---- "MOT-FR"
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Motor-6(F) = flip Z axis (pickup) "MP6" ---- "MOT-FZ" ** = linear motor **
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Motor-7(G) = die attach-rotate "MP7" ---- "MOT-DA"
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Motor-8(H) = flip X axis (handover) "MP8" ---- "MOT-FX" ** = linear motor **
Controller DMC-1826 select = "term_1"
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Motor-9(A) = wafer magazine lift "MP9" ---- "MOT-WL"
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Motor-10(B) = wafer changer "MP10" ---- "MOT-WH"
18.3.5 Motor/encoder specifications:
18.3.5.1 Motor-1(A) = wafer table X
Brushless servo motor with Hall sensors 120°, type MSSI 040H-017E-048F (CSM8
only)
●
Maximum speed Mmax = 51.1 Ncm
●
Maximum current Imax = 6.0 Aeff
●
Nominal speed n = 5300 U/min
●
Terminal resistance = 3.7 ohm
Brushless servo motor with Hall sensors 120°, type MSSI 040H-027E-048F (CSM12
only)
●
Maximum speed Mmax = 76.5 Ncm
●
Maximum current Imax = 9.0 Aeff
●
Nominal speed n = 5500 U/min
●
Terminal resistance = 1.9 ohm
Shaft encoder, type SCANCON-2RMHF-IDC-2000
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 2000 cpr, corresponds to 8000 count
●
Spindle pitch wafer table X = 5mm/revolution
●
Resolution per count = 0.625 µm
18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 485
18.3.5.2 Motor-2(B) = wafer table Y
Brushless servo motor with Hall sensors 120°, type MSSI 040H-027E-048F (CSM8
only)
●
Maximum speed Mmax = 76.5 Ncm
●
Maximum current Imax = 9.0 Aeff
●
Nominal speed n = 5500 U/min
●
Terminal resistance = 1.9 ohm
Brushless servo motor with Hall sensors 120°, type MSSI 040H-037E-048F (CSM12
only)
●
Maximum speed Mmax = 90.6 Ncm
●
Maximum current Imax = 11.0 Aeff
●
Nominal speed n = 5900 U/min
●
Terminal resistance = 1.2 ohm
Shaft encoder, type SCANCON-2RMHF-IDC-2000
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 2000 cpr, corresponds to 8000 count
●
Spindle pitch wafer table X = 5mm/revolution
●
Resolution per count = 0.625 µm
18.3.5.3 Motor-3(C) = die ejector tool changer
Motor with encoder not yet specified.
18.3.5.4 Motor-4(D) = die ejector needle
Brushless servo motor with Hall sensors 120°, type Hatherway QB01701-C
●
Maximum speed Mmax = 119 Ncm
●
Maximum current Imax = 14 Aeff
●
Idle speed n = 15488 U/min
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Terminal resistance = 6.5 ohm
Shaft encoder, type HP - HEDL-5540
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 500 cpr, corresponds to 2000 count
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Spindle pitch die ejector = 2mm/revolution
●
Resolution per count = 1.0 µm
18 Appendix
18.3 Specification: motor control
486 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.3.5.5 Motor-5(E) = flip-rotate
Brushless servo motor with Hall sensors 120°, type MSSI 055H-015E-048F
●
Maximum speed Mmax = 44.8 Ncm
●
Maximum current Imax = 2.0 Aeff
●
Nominal speed n = 1750 U/min
●
Terminal resistance = 12.1 ohm
Hollow shaft encoder, type Numerik-Jena RIK-2C 39/2048 M7-RZ
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With integrated offset and amplitude regulation
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Pitch circle diameter 39mm, number of lines =2048
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10-fold signal interpolation factor integrated in the connector
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Output signal RS422 = 5V differential with index track A,B,I
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Pulse per revolution = 2048-cpr x 10-fold = 20480-cpr, corresponds to 81920 count
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Resolution per count at the tool tip = 3.835 µm
18.3.5.6 Motor-6(F) = flip Z (pickup) motor-8(H) = flip X (handover)
3-phase linear motor with Hall sensors 120°, type ETEL TILS03-030-0018-CNN-20B
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Maximum stroke = 12mm
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Maximum acceleration = 200 m/s²
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Maximum speed = 1.3 m/s
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Maximum performance (peak force) = 19.9 N
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Maximum current Imax = 3.1 Aeff
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Terminal resistance = 4.1 ohm
Linear encoder, type RSF-Elektronik MS-100VHS
●
Output signal RS422 = 5V differential with index track A,B,I
●
Pulse distance = 2µm/cp, corresponds to 0.5µm/count
●
Index signal I = 1mm before top mechanical stopper
18.3.5.7 Motor-7(G) = rotate die attach
Brushless servo motor with Hall sensors 120°, type MSSI 032H-017E-048F
●
Maximum speed Mmax = 5.1 Ncm
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Maximum current Imax = 0.3 Aeff
●
Nominal speed n = 2200 U/min
●
Terminal resistance = 104 ohm
Shaft encoder, type SCANCON-2RMHF-7500
●
Output signal RS422 = 5V differential signals with index track A,B,I
●
Pulse per revolution = 7500 cpr, corresponds to 30000 count
●
Resolution per count at the tool tip = 5.867 µm