00195982-03_SM_SWS_EN.pdf - 第124页

7 Die ejector 7.3 Replacing spare parts 124 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.138: ► Use a small screwdriver to lever the edge (4) of the omega spring (3) upwards (5) . ► Remove the omega spring up…

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7 Die ejector
7.3 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 123
Procedure
Fig.136:
► In the change position, the wafer table still covers two of the fastening screws(1) for the die
ejector base plate.
You need to manually push the wafer table towards the wafer lift(2), until the screws are ac-
cessible.
CAUTION
Die ejector lowered?
► Before pushing the wafer table, make sure that the die ejector has really been
lowered.
WARNING
Risk of injury to hands
When manually pushing the wafer table, there is always a risk of injury by trapping the
hands.
Fig.137:
► Remove the four screws(1) fastening the die ejector base plate (Allen key5).
The omega spring pulls the base plate against the eccentric shaft(3) X direction. Remove the
omega spring (2) as follows:
7 Die ejector
7.3 Replacing spare parts
124 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.138:
► Use a small screwdriver to lever the edge(4) of the omega spring (3) upwards(5).
► Remove the omega spring upwards.
Fig.139:
► Pull the compressed air inlet line (6) for the die ejector off the pneumatic distributor.
7 Die ejector
7.3 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 125
Fig.140:
► Pull the vacuum hose (7) off the vacuum valve of the die ejector.
Fig.141:
► Unplug the following cables:
– (8) Power supply die ejector X4
– (9) Encoder signals die ejector ENC4
– (10) Remove the cable ties