00195982-03_SM_SWS_EN.pdf - 第282页

12 Wafer stretcher 12.4 Removing the wafer stretcher 282 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.390: ► Now move the wafer stretcher to a suitable position which gives you access to the four screws fasteni…

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 281

Fig.388:

► Remove the four Allen screws (3) holding the right downholder plate and remove the conical

fixing disk and Allen screw in each case.

Fig.389:

► Carefully remove the right downholder plate.

12 Wafer stretcher

12.4 Removing the wafer stretcher

282 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.390:

► Now move the wafer stretcher to a suitable position which gives you access to the four screws

fastening the left downholder plate.

Fig.391:

► Remove the four fastening screws from the left downholder plate (4) (see above) and carefully

remove the downholder plate.

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 283

Fig.392:

The cover plate for the clamping unit must now be removed as follows:

Fig.393:

► Remove the four Phillips screws (1) to (4) and the Allen screw (5). The Allen screw is also

used to fasten the clamping cylinder under the cover plate.