00195982-03_SM_SWS_EN.pdf - 第83页

5 Basic frame – X/Y unit 5.3 Replacing parts Service Manual SIPLACE Wafer System (SWS) 11/2018 83 Fig.70: ► Manually pull the complete wafer table unit in the direction of the Y motor. ð The spindle will now align itsel…

5 Basic frame – X/Y unit

5.3 Replacing parts

82 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.67:

► Carefully lift the motor and push the complete spindle unit over the base plate edge.

Lift the motor only until the coupling plate can scrape over the edge of the base plate. This en-

sures that the shaft is bent as little as possible.

Fig.68:

► Make sure that the back spindle bearing slides easily into the bearing shell when you push the

spindle unit in!

Fig.69:

► Slightly tighten the four screws (2x top and 2x bottom) so that the coupling plate can still be

moved. Secure the screws with Loctite 243.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 83

Fig.70:

► Manually pull the complete wafer table unit in the direction of the Y motor.

ð The spindle will now align itself with the coupling plate.

► Tighten the four screws fastening the coupling unit (2x top and 2x bottom).

Fig.71:

5 Basic frame – X/Y unit

5.3 Replacing parts

84 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.72:

► Connect the Y motor cable. Pay attention to the orange wires SHL and HB.

The orange wire which might be slightly thicker is the SHL and is used for shielding!

► Fit the cover plate.

5.3.1.4 Required calibration after Y motor replacement

► Calibrate the complete wafer table with the One-magic-button calibration.

Fig.73: