00195982-03_SM_SWS_EN.pdf - 第202页
9 Wafer change system 9.2 Gripper 202 Service Manual SIPLACE Wafer System (SWS) 11/2018 9.2.2 Overview of spare parts Fig.262: Spare parts on the gripper unit (example for location 2/4) Fig.263: Spare parts on the grip…
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 201
9.2 Gripper
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Gripper SWS12 (1/3) [00387108-xx]
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Gripper SWS12 (2/4) [00385525-xx]
9.2.1 Overview of main assemblies
Fig.260: Main gripper assemblies (location 2/4)
1. Gripper
2. Toothed belt axis
3. Motor with coupling
4. AD-MOT board under the cover
Fig.261: Main gripper assemblies (location 1/3)
5. Gripper
6. Toothed belt axis
7. Motor with coupling
8. AD-MOT board
9. Height adjustment
10. Barcode scanner (optional)
9 Wafer change system
9.2 Gripper
202 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.2.2 Overview of spare parts
Fig.262: Spare parts on the gripper unit (example for location 2/4)
Fig.263: Spare parts on the gripper (for location 2/4)
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 203
Fig.264: Spare parts on the gripper (for location 1/3)
Spare parts on the gripper
Item Item no. Designation
1 00385526-xx Toothed belt axis DGE-12-439
2 00384850-xx Solenoid valve CPE10-M1BH-3GL-QS-4
3 00384600-xx Board AD-MOT Rev.0 Sub-D = angled (under the cover)
4 00385452-xx Brushless cybermotor - wafer handler
5 03106449-xx Elastomer coupling without play d4,d6
6 03093951-xx Barcode scanner VB12-220-S-R (option)
7 00384823-xx Clamps, lower
8 00386153-xx Flexible clamps for gripper
9 00384901-xx Compression spring
10 00384879-xx Short-stroke cylinder AEVC-10-5-P
11 03095116-xx Proximity switch inductive