00195982-03_SM_SWS_EN.pdf - 第264页
11 Extension groups 11.2 Linear dipping unit (LDU) 264 Service Manual SIPLACE Wafer System (SWS) 11/2018 11.2 Linear dipping unit (LDU) Fig.359: Linear dipping unit (LDU) ● Linear dipping unit SWS12 (1/3) [03073446-xx] …
11 Extension groups
11.1 Wafer supports
Service Manual SIPLACE Wafer System (SWS) 11/2018 263
11.1.3.9 Replacing the screw-in cylinder for the downholder
CAUTION
Only for experienced service technicians from ASM Assembly Systems GmbH &
Co.KG
Replacement of the screw-in cylinder for the downholder and the corresponding settings re-
quired may only be performed by experienced service technicians from ASM Assembly
Systems GmbH & Co.KG. Incorrect assembly could lead to the SWS malfunctioning.
Fig.357: Downholder
► From above, loosen the grub screw (1) on the downholder.
► Unscrew and remove the downholder (3) assembly with the nut. Pay attention to the black
O‑ring (4). Replace this with a new one, if necessary.
► Screw in the new downholder and fix (lock) the height with a lock nut(5).
Setting the downholder height
Fig.358: Downholder - setting the height
●
Position (1): mushroom-shaped tool flush from the lower edge of the support strip to the top
edge of the mushroom-shaped tool
●
Position (2): distance of 5 mm from the lower edge of the support strip to the upper edge of
the mushroom-shaped tool when projected
11 Extension groups
11.2 Linear dipping unit (LDU)
264 Service Manual SIPLACE Wafer System (SWS) 11/2018
11.2 Linear dipping unit (LDU)
Fig.359: Linear dipping unit (LDU)
●
Linear dipping unit SWS12 (1/3) [03073446-xx]
●
Linear dipping unit SWS12 (2/4) [00386344-xx]
NOTICE
Service manual LDU-X
For details about the service work on the LDU, please refer to the LDU-X service manual.
12 Wafer stretcher
12.1 Explanation of the wafer stretcher
Service Manual SIPLACE Wafer System (SWS) 11/2018 265
12 Wafer stretcher
12.1 Explanation of the wafer stretcher
12.1.1 SIPLACE SWS wafer stretcher
The SIPLACE wafer system (SWS) can be configured with the SIPLACE SWS wafer stretcher op-
tion for two different wafer supports (8" or 12").
The SIPLACE SWS wafer stretcher consists of the following main assemblies:
●
Stretcher
The stretcher stretches the wafer foil. The aim is to increase the space between the dies on it.
●
Heater
The heater consists of a heating element and a fan. The fan blows heated air on to the wafer
foil. This reduces the sag of the wafer foil (less than 9 mm), so that the wafer can be transpor-
ted back into the magazine.
Fig.360: Wafer support with SIPLACE SWS wafer stretcher
1. Stretcher frame with wafer support
2. Heater fan