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14 Settings and tests 14.3 Camera calibration Service Manual SIPLACE Wafer System (SWS) 11/2018 359 IOs Fig.514: SWS GUI - Manual Settings - Manual Subsystems 1. Manual settings 2. IOs 3. Subsystem tabs 14.3 Camera cali…

14 Settings and tests

14.2 Manual settings

358 Service Manual SIPLACE Wafer System (SWS) 11/2018

Main vacuum control system

Fig.512: SWS GUI - motor settings

14.2 Manual settings

Fig.513: SWS GUI - manual settings

► Select the (1) Manual Settings button.

► Select Manual Subsystems (2) and then IOs (3).

14 Settings and tests

14.3 Camera calibration

Service Manual SIPLACE Wafer System (SWS) 11/2018 359

IOs

Fig.514: SWS GUI - Manual Settings - Manual Subsystems

1. Manual settings

2. IOs

3. Subsystem tabs

14.3 Camera calibration

Fig.515: SWS GUI - service menu

► Go to the toolbar and select the button Service

(1) and then Die handling calibration (2).

14 Settings and tests

14.3 Camera calibration

360 Service Manual SIPLACE Wafer System (SWS) 11/2018

Calibration for completely uncalibrated motor

Fig.516: SWS GUI - service menu - camera calibration – Z axis

► Select the Z-Axis (1) button.

► Select the Automatic calibration (2) button.

► Make a note of the Home position of z axis [µm] values.

► Enter the values on the relevant labels on the motor body.

Calibrating a precalibrated motor

If the new motor has already been calibrated in a test station, you can apply the Z-HomePosition.

However, the FlipRotationPositionOffset must be calibrated when installed.

Fig.517: SWS GUI - service menu - camera calibration – flipper

► Select the Flipper (1) button.

► Select the Calibration (2) tab.

► Select the Start calibration (3) button.

► Enter the Flipper calibration offset [mdeg] values on the relevant label on the motor body.