00195982-03_SM_SWS_EN.pdf - 第89页

5 Basic frame – X/Y unit 5.3 Replacing parts Service Manual SIPLACE Wafer System (SWS) 11/2018 89 Fig.81: ► Move the wafer table until the X motor is level with the semicircular recess in the side frame. Fig.82: ► Now …

5 Basic frame – X/Y unit

5.3 Replacing parts

88 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.79:

► Remove the four Allen key fastening screws (not the Phillips screws) from the coupling plate,

together with the spindle plate.

Fig.80:

► Remove the two clamping screws from the coupling.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 89

Fig.81:

► Move the wafer table until the X motor is level with the semicircular recess in the side frame.

Fig.82:

► Now remove the two screws fastening the front of the coupling housing.

► Remove the two fastening screws on the back with a short (modified) Allen key.

5 Basic frame – X/Y unit

5.3 Replacing parts

90 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.83:

► Pull the X motor, together with the coupling plate, away towards the back and lift the unit up

and out!

Fig.84:

► Remove the four screws fastening the motor.

NOTICE

You do not necessarily need to remove the cable ties fixing the motor cable to the motor

housing.