00195982-03_SM_SWS_EN.pdf - 第199页

9 Wafer change system 9.1 Magazine lift Service Manual SIPLACE Wafer System (SWS) 11/2018 199 9.1.1.8 Wafer lift - replacing the recirculating ball screw WARNING Only for experienced service technical from ASM Assembly S…

9 Wafer change system

9.1 Magazine lift

198 Service Manual SIPLACE Wafer System (SWS) 11/2018

9.1.1.7 Door switch

The door switch checks whether the supply door for the wafer lift is closed. The door switch is loc-

ated on the left side of the wafer lift.

Fig.257: Door switch on the magazine lift

► Check the input signals for the proximity switch.

► In the toolbar, select the button Manual Settings

► Go to the Manual Settings view and select the button Manual Subsystems

and then

select IOs (see 14.2 "Manual settings" [}358]).

► → Select the Wafer Changer tab.

ð The display shines:

– DI27 Wafer lift hood: closed

The connection cables are run to the protective contactor combination and connected there (see

9.1.2 "Electrical system" [}200]).

9 Wafer change system

9.1 Magazine lift

Service Manual SIPLACE Wafer System (SWS) 11/2018 199

9.1.1.8 Wafer lift - replacing the recirculating ball screw

WARNING

Only for experienced service technical from ASM Assembly Systems GmbH & Co.KG

Replacement of the recirculating ball screw and the corresponding settings required may

only be performed by experienced service technicians from ASM Assembly Systems GmbH

& Co.KG.

Fig.258: Wafer lift - replacing the recirculating ball screw

► Remove both screws (1).

► Remove the sixteen screws (2) and then remove the unit. The unit is fitted to the Passstifte.

► Remove the screw on the coupling (3).

► Remove the two screws on the fixed bearing part (4).

► Remove the two screws on the top spindle bearing (5) and then remove the recirculating ball

screw.

► Tighten the clamping screw for the coupling with a torque of 1.0 Nm.

9 Wafer change system

9.1 Magazine lift

200 Service Manual SIPLACE Wafer System (SWS) 11/2018

9.1.2 Electrical system

NOTICE

Observe the circuit diagrams.

For details of the electrical assemblies on the wafer lift, please refer to the circuit diagrams

[00195960‑xx].

Fig.259: Electrics down on the wafer lift (overview)

1. Amplifier module 2-axes AMP-19520

2. Board DMC interface input/output

3. Protective contactor combination with optoelectronic coupler

4. Fuse 3 AT on the board DMC interface