00195982-03_SM_SWS_EN.pdf - 第210页
9 Wafer change system 9.2 Gripper 210 Service Manual SIPLACE Wafer System (SWS) 11/2018 9.2.7 Dismantling the gripper for location 1/3 Fig.271: Dismantling the gripper for location 1/3 ► Remove the screws (3) and (4) fa…
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 209
9.2.6.1 Setting gentle clamping and moving of the gripper (for location 2/4)
Fig.269: Setting restrictor on gripper (2/4)
The setting restrictor helps to set the clamping of the gripper clamp (1), plus the upwards and
downwards movement of the gripper (2). Both of these actions should be gentle and with no impact
sound.
9.2.6.2 Setting gentle clamping and moving of the gripper (for location 1/3)
Fig.270: Setting restrictor on gripper (1/3)
The setting restrictor helps to set the clamping of the gripper clamp (1), plus the upwards and
downwards movement of the gripper (2). Both of these actions should be gentle and with no impact
sound.
When adjusting to the various frame strengths (thicknesses) check the return spring for the switch
flags (3).
9 Wafer change system
9.2 Gripper
210 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.2.7 Dismantling the gripper for location 1/3
Fig.271: Dismantling the gripper for location 1/3
► Remove the screws (3) and (4) fastening the gripper (1) and then carefully placed the gripper
in the SWS. Loosen or open the cable ties to reach a suitable position, if needed.
► Unplug the pneumatic connections at the couplings provided.
► Unthread the connection cable as far as the conversion board on the gripper arm.
► If there is no marking present on the cables: use the circuit diagram folder for help and mark
the cables connected.
► Unplug all connections from the terminal strip.
► Fit the new gripper and check the height.
Fig.272: Setting the gripper height (location 1/3)
► The gripper clamp must be able to reliably pick up a wafer frame and clamp it into place.
► You can correct the height with the help of the fastening screws in the slotted holes.
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 211
9.2.8 Dismantling the gripper for location 2/4
Fig.273: Dismantling the gripper for location 2/4
► Remove the screws (2) fastening the gripper (1).
► Place the gripper carefully into the SWS. Loosen or open the cable ties to reach a suitable
position, if needed.
► Unplug the pneumatic connections at the couplings provided.
► Unthread the connection cable as far as the conversion board on the gripper arm.
► If there is no marking present on the cables: use the circuit diagram folder for help and mark
the cables connected.
► Unplug all connections from the terminal strip.
► Fit the new gripper and check the height.
► The gripper clamp must be able to reliably pick up a wafer frame and clamp it into place (see
9.2.7 "Dismantling the gripper for location 1/3" [}210]).
Fig.274: Setting the gripper height (variant 2,4)
► Use the adjusting screw (1) to correct the height.