00195982-03_SM_SWS_EN.pdf - 第341页

13 BoxPC, GALIL cards and axis control 13.2 GALIL cards in the BoxPC Service Manual SIPLACE Wafer System (SWS) 11/2018 341 13.2 GALIL cards in the BoxPC 13.2.1 General information about the GALIL cards Fig.487: 1. AXIS …

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13 BoxPC, GALIL cards and axis control
13.1 Removing and replacing the BoxPC
340 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.485:
► Thread the BoxPC over the Allen screws and pull the BoxPC backwards.
► Tighten the Allen screws.
13.1.4.1 Connecting the new BoxPC
► Connect all cables on the back of the BoxPC (see 13.1.2.1 "Cable connections on the back of
the BoxPC" [}335]).
All cables and terminals are labeled.
► If the cable ties for the strain relief have been undone, you will need to do them up again.
13.1.4.2 Final work after installation
Fig.486:
► Push the side cover plate towards the back.
► Tighten the side cover plate with the two Allen screws.
► Fit the left side cover panel.
► Refit the SWS in the CA machine.
► Switch the SWS on.
► Install the required software.
Use the recovery DVD you created before for this (see 13.1.1.1 "Data backup" [}333]).
► Reference the SWS.
ð The SWS is now ready for operation.
13 BoxPC, GALIL cards and axis control
13.2 GALIL cards in the BoxPC
Service Manual SIPLACE Wafer System (SWS) 11/2018 341
13.2 GALIL cards in the BoxPC
13.2.1 General information about the GALIL cards
Fig.487:
1. AXIS 1/4 → PCI bus GALIL motion controller DMC-1886
2. AXIS 9/10 → PCI bus GALIL motion controller DMC-1826
3. AXIS 5/6 (8) → PCI bus GALIL motion controller extension
4. Connection → connection to the additional four axis outputs
Fig.488:
13 BoxPC, GALIL cards and axis control
13.2 GALIL cards in the BoxPC
342 Service Manual SIPLACE Wafer System (SWS) 11/2018
PCI BUS GALIL motion controller
Various different PCI BUS GALIL motion controllers can be used in the BoxPC.
The number of axes which can be addressed depends on the type used.
Type PCI bus GALIL motion controller DMC-1886
The type DMC-1886 (1) can control a total of 8 axes.
(DMC-1886 → third position "8" for 8 axes)
The 100 pin connector used can, however, only transmit signals for a total of four axes.
For this reasons, one output is used to supply an additional card with a 100 pin connector via a
connection cable ((4) within the BoxPC).
The signals from the additional output on the DMC-1886 are only looped through on this card (3).
The axis control function is on the DMC-1886.
The following axes are controlled with the card in the SWS:
●
Wafer table X (6)
●
Wafer table Y (6)
●
Die ejector tool change (6)
●
Die ejector (6)
●
Flip rotate (rotate axis flip unit) (8)
●
Flip Z axis pick up (8)
●
Die attach unit rotate (9) → optional
●
Flip X axis/hand over (9) → optional
Type PCI bus GALIL motion controller DMC-1826
The type DMC-1826 (2) can control a total of 2 axes.
(DMC-1826 → third position "2" for 2 axes)
The following axes are controlled with the card in the SWS:
●
Magazine lift (11)
●
Wafer handler (gripper) (11)